High-speed bolometric detector based on a graphitized layer buried into bulk diamond

Sharkov, A. V.; Galkina, T. I.; Klokov, A. Yu.; Хмельницкий, Р. А.; Dravin, V. A.; Gippius, A. A.

doi:10.1016/s0042-207x(02)00455-4

Cited by 12 publications

(8 citation statements)

References 2 publications

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“…The employed fabrication technique allows to define arbitrary electrode geometries with micrometric resolution in the diamond bulk (i.e. up to several micrometers below the sample surface) by exploiting the radiation-induced graphitization of the material occurring at the end of the MeV ion penetration range, and has already been successfully adopted to realize different integrated devices in diamond, such as bolometers [23,24], particle detectors [25], cellular biosensors [26,27] and IR emitters [28]. More pertinently to this work, sub-superficial graphitic electrodes were previously employed to stimulate electroluminescence from diamond color centers, both in multi-photon [29] and single-photon [30] emission regimes.…”

Section: Introductionmentioning

confidence: 99%

Electrical control of deep NV centers in diamond by means of sub-superficial graphitic micro-electrodes

Forneris

Tchernij

Tengattini

et al. 2017

Carbon

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The control of the charge state of nitrogen-vacancy (NV) centers in diamond is of primary importance for the stabilization of their quantum-optical properties, in applications ranging from quantum sensing to quantum computing. In this work buried current-injecting graphitic micro-electrodes were fabricated in bulk diamond by means of a 6 MeV C 3+ scanning micro-beam. The electrodes were exploited to control the variation in the relative population of the negative (NV − ) and neutral (NV 0 ) charge states of sub-superficial NV centers located in the inter-electrode gap regions. Photoluminescence spectra exhibited an electrically-induced increase up to 40% in the NV − population at the expense of the NV 0 charge state, with a linear dependence from the injected current at applied biases smaller than 250V, and was interpreted as the result of electron trapping at NV sites. An * Corresponding author: Tel +39 011 6707306, forneris@to.infn.it, J. Forneris et al., "Electrical control of sub-superficial NV centers in diamond…" p. ! 2 abrupt current increase at ∼300V bias resulted in a strong electroluminescence from the NV0 centers, in addition to two spectrally sharp emission lines at 563.5 nm and 580 nm, not visible under optical excitation and attributed to self-interstitial defects. These results disclose new possibilities in the electrical control of the charge state of NV centers located in the diamond bulk, which are characterized by longer spin coherence times.

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Section: Introductionmentioning

confidence: 99%

Electrical control of deep NV centers in diamond by means of sub-superficial graphitic micro-electrodes

Forneris

Tchernij

Tengattini

et al. 2017

Carbon

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“…This approach takes advantage of the metastable nature of diamond, which can be converted into the stable allotropic form of carbon at room temperature and pressure conditions (i.e. graphite) by creating high defect concentration in the lattice [50][51][52][53][54][55][56].…”

Section: Introductionmentioning

confidence: 99%

Development and Characterization of a Diamond-Insulated Graphitic Multi Electrode Array Realized with Ion Beam Lithography

Picollo

Battiato

Carbone

et al. 2014

Sensors

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The detection of quantal exocytic events from neurons and neuroendocrine cells is a challenging task in neuroscience. One of the most promising platforms for the development of a new generation of biosensors is diamond, due to its biocompatibility, transparency and chemical inertness. Moreover, the electrical properties of diamond can be turned from a perfect insulator into a conductive material (resistivity ∼mΩ·cm) by exploiting the metastable nature of this allotropic form of carbon. A 16-channels MEA (Multi Electrode Array) suitable for cell culture growing has been fabricated by means of ion implantation. A focused 1.2 MeV He+ beam was scanned on a IIa single-crystal diamond sample (4.5 × 4.5 × 0.5 mm3) to cause highly damaged sub-superficial structures that were defined with micrometric spatial resolution. After implantation, the sample was annealed. This process provides the conversion of the sub-superficial highly damaged regions to a graphitic phase embedded in a highly insulating diamond matrix. Thanks to a three-dimensional masking technique, the endpoints of the sub-superficial channels emerge in contact with the sample surface, therefore being available as sensing electrodes. Cyclic voltammetry and amperometry measurements of solutions with increasing concentrations of adrenaline were performed to characterize the biosensor sensitivity. The reported results demonstrate that this new type of biosensor is suitable for in vitro detection of catecholamine release.

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“…The definition of graphitic conductive regions in diamond has found several interesting applications, such as ohmic contacts [27][28][29][30], infrared radiation emitters [31], field emitters [32], bolometers in both single-crystal [33] and polycrystalline [34] samples, metallo-dielectric photonic crystals [35] and ionizing radiation detectors for x-ray [36] and MeV ion [37] beams.…”

Section: Introductionmentioning

confidence: 99%

Fabrication and electrical characterization of three-dimensional graphitic microchannels in single crystal diamond

et al. 2012

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We report on the systematic characterization of conductive micro-channels fabricated in single-crystal diamond with direct ion microbeam writing. Focused high-energy (∼MeV) helium ions are employed to selectively convert diamond with micrometric spatial accuracy to a stable graphitic phase upon thermal annealing, due to the induced structural damage occurring at the end-of-range. A variable-thickness mask allows the accurate modulation of the depth at which the microchannels are formed, from several µm deep up to the very surface of the sample. By means of cross-sectional transmission electron microscopy (TEM), we demonstrate that the technique allows the direct writing of amorphous (and graphitic, upon suitable thermal annealing) microstructures extending within the insulating diamond matrix in the three spatial directions, and in particular, that buried channels embedded in a highly insulating matrix emerge and electrically connect to the sample surface at specific locations. Moreover, by means of electrical characterization at both 2 room temperature and variable temperature, we investigate the conductivity and the charge-transport mechanisms of microchannels obtained by implantation at different ion fluences and after subsequent thermal processes, demonstrating that upon high-temperature annealing, the channels implanted above a critical damage density convert into a stable graphitic phase. These structures have significant impact for different applications, such as compact ionizing radiation detectors, dosimeters, bio-sensors and more generally diamond-based devices with buried three-dimensional all-carbon electrodes.

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High-speed bolometric detector based on a graphitized layer buried into bulk diamond

Cited by 12 publications

References 2 publications

Electrical control of deep NV centers in diamond by means of sub-superficial graphitic micro-electrodes

Electrical control of deep NV centers in diamond by means of sub-superficial graphitic micro-electrodes

Development and Characterization of a Diamond-Insulated Graphitic Multi Electrode Array Realized with Ion Beam Lithography

Fabrication and electrical characterization of three-dimensional graphitic microchannels in single crystal diamond

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