2011
DOI: 10.1063/1.3652912
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High speed and high density organic electrochemical transistor arrays

Abstract: A generic lithographic process is presented that allows the fabrication of high density organic electrochemical transistor arrays meant to interface with aqueous electrolytes. The channels of the transistors, which were 6 μm long, were made of the conducting polymer poly(3,4-ethylenedioxythiophene) doped with poly(styrene sulfonate) and were in direct contact with phosphate buffered saline. Source and drain electrodes and interconnects were insulated by parylene C, a biocompatible material. The transistors ope… Show more

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Cited by 100 publications
(80 citation statements)
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“…22 It has also been shown that one can conduct photolithography on parylene, which enables the fabrication of micro-patterned electrode structures on parylene. 23 …”
Section: Resultsmentioning
confidence: 99%
“…22 It has also been shown that one can conduct photolithography on parylene, which enables the fabrication of micro-patterned electrode structures on parylene. 23 …”
Section: Resultsmentioning
confidence: 99%
“…The fabrication and in vivo validation of PEDOT:PSS electrodes34 and the patterning of PEDOT:PSS OECTs38 were discussed in previous publications. Here we used an adapted fabrication process that involved the deposition and patterning of parylene, Au and PEDOT:PSS films as follows: Parylene C was deposited using an SCS Labcoater 2 to a thickness of 2 μm (at which thickness parylene films are pinhole-free).…”
Section: Methodsmentioning
confidence: 99%
“…Recent advances have permitted the development of OECTs that can transduce low level gate currents over a broad range of frequencies. 19,20 This new generation of devices has a flat band frequency response up to at least 1-10 kHz. In this letter, we demonstrate the use of the OECT to carry out electrochemical impedance spectroscopy on epithelial layers, with the goal of demonstrating high confidence at both low and high frequencies.…”
mentioning
confidence: 99%