High speed 3D surface profile without axial scanning: dual-detection confocal reflectance microscopy

Lee, Dong‐Ryoung; Kim, Young-Duk; Gweon, Dae−Gab; Yoo, Hongki

doi:10.1088/0957-0233/25/12/125403

Cited by 16 publications

(11 citation statements)

References 19 publications

(21 reference statements)

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“…Axial response curves of different properties are provided from the signals obtained from the two different optical paths. By dividing the distinct intensities of the two detected images at the two detectors simultaneously, MS‐DDCM yields a normalised ratio of the axial response curve that can be used to directly achieve surface profile rendering (Lee et al ., ; Lee et al ., ). We were able to encode the characteristic curve using the ratio curve.…”

Section: Principlementioning

confidence: 97%

Multipoint scanning dual‐detection confocal microscopy for fast 3D volumetric measurement

Lee

Gweon

Yoo

2017

Journal of Microscopy

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We propose a multipoint scanning dual-detection confocal microscopy (MS-DDCM) system for fast 3D volumetric measurements. Unlike conventional confocal microscopy, MS-DDCM can accomplish surface profiling without axial scanning. Also, to rapidly obtain 2D images, the MS-DDCM employs a multipoint scanning technique, with a digital micromirror device used to produce arrays of effective pinholes, which are then scanned. The MS-DDCM is composed of two CCDs: one collects the conjugate images and the other collects nonconjugate images. The ratio of the axial response curves, measured by the two detectors, provides a linear relationship between the height of the sample surface and the ratio of the intensity signals. Furthermore, the difference between the two images results in enhanced contrast. The normalising effect of the MS-DDCM provides accurate sample heights, even when the reflectance distribution of the surface varies. Experimental results confirmed that the MS-DDCM achieved high-speed surface profiling with improved image contrast capability.

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Section: Principlementioning

confidence: 97%

Multipoint scanning dual‐detection confocal microscopy for fast 3D volumetric measurement

Lee

Gweon

Yoo

2017

Journal of Microscopy

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“…In fact, sample reflectivity proportionally affects the detected intensity. In order to utilize the one-to-one relationship between the detected intensity of the confocal microscopy and the axial position of a sample, while removing the effect of the sample reflectivity, DDCM was developed [118,119]. Figure 8(a) shows a schematic of DDCM, which uses two pinhole detectors with different sizes located at the focal plane of the collecting lens after dividing the detection beam into two paths.…”

Section: Dual-detection Confocal Microscopy (Ddcm)mentioning

confidence: 99%

Three-dimensional confocal reflectance microscopy for surface metrology

Kim

Yoo

2021

Meas. Sci. Technol.

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Confocal microscopy uses a confocal aperture in front of a detector to eliminate out-of-focus blur, providing optical sectioning, high spatial resolution, and high contrast. It enables precise three-dimensional (3D) reconstruction of a sample surface. Using objective lenses with high numerical aperture and short wavelength illumination, confocal microscopy offers high spatial resolution in both lateral and axial directions in a non-destructive and non-contact manner. These qualities make confocal microscopy an ideal tool for the inspection and measurement of microscopic samples. One of the limitations of confocal microscopy for 3D surface metrology, however, is its speed. Both lateral and axial scanning is needed to produce a stack of two-dimensional images along the height, and this takes more time. While high-end confocal laser scanning microscopy can acquire a 3D sample surface within a few seconds, an even faster imaging speed is required in some applications, such as in in-line inspection. Various techniques have been proposed to speed up 3D confocal measurements, such as chromatic confocal microscopy, differential confocal microscopy, dual-detection confocal microscopy, and direct-view confocal microscopy. Here, we review the basic principles, theories, scanning methods, and progress of confocal microscopy for surface metrology, and we discuss the latest progress in the field of ultrafast 3D surface measurement. We anticipate that confocal microscopy, which has become one of the standard metrology tools, will continue to evolve for 3D surface measurement.

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“…Raman microscopy is one of the powerful chemical imaging techniques because it enables us to characterize biochemical composition without labeling and visualize morphological structure [14]. Especially, confocal Raman microscopy has the capability of optical sectioning by eliminating out-of-focus noise with a confocal pinhole [15][16][17]. However, Raman imaging requires a long exposure time due to weak Raman scattering signals and high spectral resolution over a wide spectral range.…”

Section: Introductionmentioning

confidence: 99%

Histological classification of atherosclerotic arteries using high‐speed confocal Raman microscopy with machine learning

Xing

Lee

Kim

et al. 2022

Journal of Biophotonics

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Confocal Raman microscopy is a useful tool to observe composition and constitution of label‐free samples at high spatial resolution. However, accurate characterization of microstructure of tissue and its application in diagnostic imaging are challenging due to weak Raman scattering signal and complex chemical composition of tissue. We have developed a method to improve imaging speed, diffraction efficiency, and spectral resolution of confocal Raman microscopy. In addition to the novel imaging technique, the machine learning method enables confocal Raman microscopy to visualize accurate histology of tissue sections. Here, we have demonstrated the performance of the proposed method by measuring histological classification of atherosclerotic arteries and compared the histological confocal Raman images with the conventional staining method. Our new confocal Raman microscopy enables us to comprehend the structure and biochemical composition of tissue and diagnose the buildup of atherosclerotic plaques in the arterial wall without labeling.

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High speed 3D surface profile without axial scanning: dual-detection confocal reflectance microscopy

Cited by 16 publications

References 19 publications

Multipoint scanning dual‐detection confocal microscopy for fast 3D volumetric measurement

Multipoint scanning dual‐detection confocal microscopy for fast 3D volumetric measurement

Three-dimensional confocal reflectance microscopy for surface metrology

Histological classification of atherosclerotic arteries using high‐speed confocal Raman microscopy with machine learning

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