Ambient ionization based on liquid extraction is widely used in mass spectrometry imaging (MSI) of molecules in biological samples. The development of nanospray desorption electrospray ionization (nano-DESI) has enabled the robust imaging of tissue sections with high spatial resolution. However, the fabrication of the nano-DESI probe is challenging, which limits its dissemination to the broader scientific community. Herein, we describe the design and performance of an integrated microfluidic probe (iMFP) for nano-DESI MSI. The glass iMFP fabricated using photolithography, wet etching, and polishing shows comparable performance to the capillary-based nano-DESI MSI in terms of stability and sensitivity; the spatial resolution of better than 25 μm was obtained in these first proof-of-principle experiments. The iMFP is easy to operate and align in front of a mass spectrometer, which will facilitate broader use of liquid extraction-based MSI in biological research, drug discovery, and clinical studies. File list (3) download file view on ChemRxiv Manuscript-An Integrated Microfluidic Probe-ChemRxiv.... (733.76 KiB) download file view on ChemRxiv Manuscript-An Integrated Microfluidic Probe-ChemRxiv.... (466.01 KiB) download file view on ChemRxiv Supporting Information-An Integrated Microfluidic Probe... (492.35 KiB)