Abstract:Herein, based on the finite‐element calculation method, a high‐sensitivity infrared absorption sensor is designed with ZnSe as the substrate, Mo as the waveguide layer and periodic grating, and Ge as the thin film. The absorption performance of the structure is not sensitive to the polarization of the incident light when the transverse‐magnetic light wave is perpendicular to the structure. The thickness of the Ge thin film and the width of the grating column are the main factors for determining its absorption … Show more
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