Abstract:We demonstrate an improvement in the thermal sensitivity of the MelDIR thermal diode infrared sensor which was launched by Mitsubishi Electric Corporation in 2019. To improve the thermal sensitivity of a MelDIR sensor while suppressing any increase in its thermal time constant, we proposed a high thermal absorption pixel structure using an IR absorber composed of a thin metal film. The thin metal film is deposited on the upper layer of the layer of p-n junction diodes. We used a flat structure which has almost… Show more
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