High sensitivity permeability measurements of striped films obtained by input impedance

Yabukami, S.; Uo, T.; Yamaguchi, Masahiro; Arai, Ken‐ichi; Takezawa, M.

doi:10.1109/20.951304

Cited by 4 publications

(1 citation statement)

References 11 publications

(9 reference statements)

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“…There are many conventional methods of measuring thin film permeability such as the figure-eight coil method, 1 the shielded loop coil method, 2 the transmission-line method, 3 and a method based on impedance change measurement. 4,5 However, all permeameters require a small size sample. Therefore, researchers and engineers must usually cut wafers and specially prepare a sample for permeability evaluation.…”

Section: Introductionmentioning

confidence: 99%

Measurement of thin film permeability by direct contact and optimization

Yabukami

2009

Journal of Applied Physics

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Microfluxgate sensor with amorphous cobalt (Co-Nb-Zr) soft magnetic core for electronic compass J. Appl. Phys. 99, 08M306 (2006); 10.1063/1.2172540 Secondary peaks on microwave permeability spectra of soft ferromagnetic thin films with in-plane anisotropy J. Appl. Phys. 97, 10F903 (2005); 10.1063/1.1851914Microwave permeability spectra of ferromagnetic thin films over a wide range of temperatures A highly sensitive method for obtaining the permeability of magnetic film without a limitation of sample size was developed based on the electrical impedance of magnetic film in contact with a copper conductor. The permeability of a CoNbZr thin film ͑25ϫ 25 mm 2 , 4 m thick͒ was evaluated in the frequency range of 10 MHz-4 GHz, the measured values roughly corresponding to those obtained by the Landau-Lifshitz-Gilbert equation. The proposed method shows promise for permeability measurement of wafer-sized samples because the method is free of size limitation.

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Section: Introductionmentioning

confidence: 99%

Measurement of thin film permeability by direct contact and optimization

Yabukami

2009

Journal of Applied Physics

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High-frequency permalloy permeability extracted from scattering parameters

Wang

Tien

et al. 2004

Journal of Applied Physics

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We report a ferromagnetic thin film characterization method and the measured microwave permeability of patterned permalloy films. The method incorporates ferromagnetic materials with transmission lines and extracts RLCG equivalent circuit elements from scattering parameters. The frequency-dependent effective permeability is then obtained from the incremental R and L caused by the ferromagnetic material. The measured high-frequency losses of thin permalloy (Ni80Fe20) films between 1 and 20 GHz show that geometry design restrains ferromagnetic resonance and eddy-current effects effectively. Above ∼22 GHz, mode conversion occurs in the test structures. Other broadband structures are necessary for further extractions.

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An induction method to calculate the complex permeability of soft magnetic films without a reference sample

Wei

Wang

Liu

et al. 2014

Review of Scientific Instruments

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A new analytical method has been proposed by utilizing an electromagnetic induction principle with a short-circuited microstrip line jig and the complex permeability spectra can be calculated without a known reference sample. The new method using the short-circuited microstrip line can exhibit higher sensitivity and a wider frequency band than coplanar waveguide and pick-up coil. Two magnetic thin films having a good in-plane uniaxial anisotropy are measured by using the induction method. The results show typical complex permeability spectra in good agreement with the theoretical analytical results. The measured permeability values are verified by comparing with the initial susceptibility derived from the sweeping field results. The difference of measured permeability values is less than 5%.

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High sensitivity permeability measurements of striped films obtained by input impedance

Cited by 4 publications

References 11 publications

Measurement of thin film permeability by direct contact and optimization

Measurement of thin film permeability by direct contact and optimization

High-frequency permalloy permeability extracted from scattering parameters

An induction method to calculate the complex permeability of soft magnetic films without a reference sample

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