2016 Ieee Sensors 2016
DOI: 10.1109/icsens.2016.7808638
|View full text |Cite
|
Sign up to set email alerts
|

High sensitive gas sensors realized by a transfer-free process of CVD graphene

Abstract: The work herein presented investigates the behavior of graphene-based gas sensors realized by using an innovative way to prepare graphene. The sensing layer was directly grown by chemical vapor deposition on pre-patterned CMOS compatible Mo catalyst and then it was eased on the underlying SiO 2 through a completely transfer-free process. Devices with different geometries were designed and tested towards NO 2 and NH 3 in environmental conditions, i.e. room temperature and relative humidity set at 50%. Furthermo… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
4
1

Citation Types

4
23
0

Year Published

2017
2017
2024
2024

Publication Types

Select...
6
1

Relationship

0
7

Authors

Journals

citations
Cited by 16 publications
(27 citation statements)
references
References 13 publications
4
23
0
Order By: Relevance
“…The sensor worked without electricity; was soft, wearable, and small; and performed well, thus having broad application prospects. In 2017, Ricciardella F from Delft University of Technology prepared the graphene sensing layer by chemical vapor deposition on pre-patterned catalyst and then it was eased onto the underlying SiO2 through a completely transfer-free process [63]. The gas sensing materials had different line width: 5 and 10 μm.…”
Section: Gas Sensors Based On Pristine Graphenementioning
confidence: 99%
“…The sensor worked without electricity; was soft, wearable, and small; and performed well, thus having broad application prospects. In 2017, Ricciardella F from Delft University of Technology prepared the graphene sensing layer by chemical vapor deposition on pre-patterned catalyst and then it was eased onto the underlying SiO2 through a completely transfer-free process [63]. The gas sensing materials had different line width: 5 and 10 μm.…”
Section: Gas Sensors Based On Pristine Graphenementioning
confidence: 99%
“…Here, we present the performances of the gas chemi-resistors based on graphene fabricated through a process specifically developed to lower the growth temperature down to 850 °C. This value is significantly much lower than the 980 °C usually adopted as graphene growth temperature [2,4,5]. The choice to reduce the growth temperature is motivated by the fact that a lower growth temperature can reduce the energy consumption during the graphene growth and facilitate large scale production of these gas sensors.…”
Section: Introductionmentioning
confidence: 97%
“…However, for practical applications, the bottleneck related to the CVD technique is inherent to the graphene transfer from the catalyst substrate to the target one [3]. On this regard, we have recently reported a transfer-free process (TFP) that prevents any issue related to the graphene transfer [4]. In our previous work, graphene-based gas sensors prepared through TFP were found to be able to achieve extremely low limit of detection (LOD), in the range of a few hundred ppb of NO2, and resulted scarcely sensitive towards NH3 [4].…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…However, the mechanism of interaction between graphene and the adsorbing molecules is particularly dependent of each target chemical species [3][4][5][6][10][11][12]. Among the diversity of existing target gases, ammonia (NH3) has been widely studied for graphene-based sensors [13][14][15][16][17][18][19][20][21][22][23] due to its great significance for industrial applications [24]. Theoretical works show that charge transferred from NH3 to graphene is dependent on the orientation of the NH3 molecules [25,26].…”
Section: Introductionmentioning
confidence: 99%