High sensitive biosensor with extended-gate ISFETs based on in-plane-gate structure a-IGZO TFTs with engineered gate oxide

Jeon, Jaekwon; Cho, W.J.

doi:10.7567/ssdm.2019.a-3-03

Extended Abstracts of the 2019 International Conference on Solid State Devices and Materials 2019

DOI: 10.7567/ssdm.2019.a-3-03

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High sensitive biosensor with extended-gate ISFETs based on in-plane-gate structure a-IGZO TFTs with engineered gate oxide

Jaekwon Jeon¹,

W.J. Cho²

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High sensitive biosensor with extended-gate ISFETs based on in-plane-gate structure a-IGZO TFTs with engineered gate oxide

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