High-Resolution Thermal Processing of Semiconductors Using Pulsed-Laser Interference Patterning

Kelly, M. K.; Rogg, Joseph; Nebel, Christoph E.; Stutzmann, M.; Kátai, Sz.

doi:10.1002/(sici)1521-396x(199804)166:2<651::aid-pssa651>3.0.co;2-p

Cited by 53 publications

(25 citation statements)

References 4 publications

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“…While conventional techniques do not allow minimization of the surface features down to the micrometer or even sub-micrometer scale, laser interference direct structuring can produce lateral feature sizes from sub-micrometer scale up to several micrometers by making minor changes in the optical system. [19][20][21] Additionally, the laser interference direct structuring technique combines the topographic texturing of surfaces with microstructural changes for a hierarchical order that is expected to further improve tribological behavior and lower the friction coefficient.…”

Section: Techniques For Creating Surfaces By Topographic Texturingmentioning

confidence: 99%

“…The angles between the beams define the two-dimensional interference fringe spacing in the intensity distribution. Spacing can be calculated for a two-beam interference experiment as well as for the Lloyd's mirror arrangement by employing the following simple formula: [21] d…”

Section: Interfering Coherent Beams For Periodic Structuringmentioning

confidence: 99%

“…[21,24,31] Generally, the lowest physical length limit for the spacing of the interference fringe according to Equation 2 is half of the laser wavelength. This limit can be pushed down by changing the wavelength just above the sample.…”

Section: Feature Spacingmentioning

confidence: 99%

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Phase‐Modulated Hierarchical Surface Structures by Interfering Laser Beams

Daniel

Dahotre

2006

Adv Eng Mater

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A high‐energy laser interference direct modulation technique is proposed to develop surfaces for energy‐efficient performance based on microstructure and physical parameter control. By producing the surface features or particles at the nano to micron scale in an orderly and/or parallel manner with a lateral long‐range order, the surfaces can be configured for highly improved surface response for a host of properties, including wear and friction. Laser interference direct modulation can lead to an optimized composite of metallurgical (localized alloyed or composite regions) and topographic textures. The technique is rapid prototyping, low cost and one‐step method that can be well‐integrated into existing production lines without the need for any special atmosphere. It is usable for complex geometries of the components and the surface can be modulated for nano‐micro scale features on large areas. The present paper describes the principle behind the laser interference technique configured for surface modulation and provides the definitions of surface structures (features) evolved. Some examples of laser‐based surface modulation of materials systems are presented.

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Section: Techniques For Creating Surfaces By Topographic Texturingmentioning

confidence: 99%

Section: Interfering Coherent Beams For Periodic Structuringmentioning

confidence: 99%

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Phase‐Modulated Hierarchical Surface Structures by Interfering Laser Beams

Daniel

Dahotre

2006

Adv Eng Mater

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“…Direct Laser Interference Patterning (DLIP) permits the fabrication of repetitive 1D and 2D patterns and microstructures by direct irradiation of the sample surface with coherent beams of light. [9][10][11] Furthermore, the most important advantage of this method is that no additional process steps (i.e. etching, development of photoresist) are required.…”

mentioning

confidence: 99%

One‐Step Production of Organized Surface Architectures on Polymeric Materials by Direct Laser Interference Patterning

et al. 2007

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Periodical Micro‐Structuring of Hydride Containing Metastable Aluminumoxide using Laser Interference Metallurgy

et al. 2005

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Interference of coherent laser beams may be used to structure different types of materials ranging from metals [1] over semiconductors [2,3] to organic polymers. [4] In this process coherent laser beams interfere with one and another to create perfect line-like or dot-like periodic patterns with a very high long range order. During this process the periodic energy distribution is used to be transformed by three effects according to Bäuerle: [5] In the case of polymers with a low amount of free' electrons to interact with the electrical field vector of the electromagnetic wave, primarily a non-thermal photochemical bond-breaking and resulting ablation of material gives the possibilty for a topographical structuring. In the case of semiconductors and ceramics both thermal and nonthermal effects are in an equilibrium and a photo-physical periodical ablation and periodical heat treatment with effects such as melting, re-crystallization and phase transformation, etc., are the results. In the case of metals with a large amount of free' electrons, the non-thermal wave energy is instantanaously transformed into heat and gives the possibility for a periodical heat treatment. Periodical heat treatment of ceramics and metals opens the path to periodical micro-metallurgy. [1] Recently, we have shown that a HAlO layer, which has been produced using the molecular precursor ([tBu-O-AlH 2 ] 2 ) [6,7] in a CVD (chemical vapor deposition) process, can be transformed through thermal treatment into an Al/Al 2 O 3 composite. The chemical processes in these transformations are assembled in the Reactions 1 to 3.These reactions can be explained as follows: In a first step the HAlO layer is deposited on metallic (Cu, Ni, Fe) or semiconducting (Si) substrates, when a gas flow of [(H 3 C) 3 C-OAlH 2 ] 2 at reduced pressure is oriented on the heated substrate. At temperatures over 230 C on the surface of the substrate, the molecular precursor loses simultaneously hydrogen and isobutene forming a transparent layer of HAlO. [8] When this HAlO layer is heated up to higher temperatures (400-550 C), one can observe the evolution of dihydrogen in an on-line mass spectrometer and also a steady change of the color to grey or black, depending on the conditions (time of heating, thickness of the HAlO layer). Elemental analysis (volumetric titration of the metal ions and EDX) of the obtained layer reveals a 1:1 molar ratio of aluminum and oxygen and no hydrogen due to CHN-analysis. In the X-ray diffractogram of the layer (scratched and grinded to a powder) only the diffraction lines of aluminum appear, whereas after heating in a vacuum additional lines of a second phase evolute, which can be attributed to c-Al 2 O 3 . From these findings it can be deduced that the ceramic HAlO layer has been transformed to a composite of metallic aluminum in an amorphous Al 2 O 3 matrix. 27 Al solid state NMR in the MAS mode as well as XPS spectroscopy of this composite reflect the composite nature of the product as well as of its phases. We assume that the mechanism ...

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High-Resolution Thermal Processing of Semiconductors Using Pulsed-Laser Interference Patterning

Cited by 53 publications

References 4 publications

Phase‐Modulated Hierarchical Surface Structures by Interfering Laser Beams

Phase‐Modulated Hierarchical Surface Structures by Interfering Laser Beams

One‐Step Production of Organized Surface Architectures on Polymeric Materials by Direct Laser Interference Patterning

Periodical Micro‐Structuring of Hydride Containing Metastable Aluminumoxide using Laser Interference Metallurgy

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