High resolution quartz flexure accelerometer based on laser self-mixing interferometry

Wang, Cuo; Li, Xingfei; Kou, Ke; Wu, Tong; Xiang, Haige

doi:10.1063/1.4921903

Cited by 8 publications

(4 citation statements)

References 23 publications

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“…A considerable demand for high-performance inertial sensors has been growing in areas such as inertial navigation, seismic monitoring, and attitude control. Compared with traditional accelerometers that are based on capacitive, piezoresistive, and piezoelectric readouts, optical methods are promising due to their high sensitivity, immunity to electromagnetic interference, and remote sensing ability [ 1 , 2 , 3 , 4 ]. A large number of schemes using different optical techniques have been introduced, including interferometry [ 5 , 6 ], Fabry–Perot cavity [ 7 , 8 ], and evanescent wave (EW) coupling [ 9 , 10 ].…”

Section: Introductionmentioning

confidence: 99%

Single Chip-Based Nano-Optomechanical Accelerometer Based on Subwavelength Grating Pair and Rotated Serpentine Springs

Bai

Wang

et al. 2018

Sensors

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Optical coupling between subwavelength grating pairs allows for the precise measurement of lateral or vertical displacement of grating elements and gives rise to different types of displacement and inertial sensors. In this paper, we demonstrate a design for a nano-optomechanical accelerometer based on a subwavelength grating pair that can be easily fabricated by a single Silicon-on-insulator (SOI) chip. The parameters of the subwavelength grating pair-based optical readout, including period, duty cycle, thickness of grating and metal film, and the distance of the air gap, were optimized by combining a genetic algorithm and rigorous coupled wavelength analysis (RCWA) to obtain the optimal sensitivity to the displacement of suspended grating element and the acceleration. A corresponding mechanical design was also completed to meet the highly sensitive acceleration measurement requirement while considering the mechanical cross-axis sensitivity, dynamic range, bandwidth, and fabrication feasibility. This device was verified by both RCWA and finite-different-time-domain methods, and a tolerance analysis was also completed to confirm that it is able to achieve the extremely high optical displacement sensitivity of 1.8%/nm, acceleration-displacement sensitivity of 1.56 nm/mg, and acceleration measurement sensitivity of more than 2.5%/mg, which is almost one order of magnitude higher than any reported counterparts. This work enables a single SOI-based high performance accelerometer, and provides a theoretical basis and fabrication guides for the design.

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Section: Introductionmentioning

confidence: 99%

Single Chip-Based Nano-Optomechanical Accelerometer Based on Subwavelength Grating Pair and Rotated Serpentine Springs

Bai

Wang

et al. 2018

Sensors

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“…O PTICAL feedback interferometry (OFI) is a well-known method for displacement measurement using a laser diode (LD) as it benefits from its inherent self-aligned property as well as its low-cost [1], [2]. As a result, OFI has been applied in a wide range of sensing applications, including the measurement of distance [3], displacement [4], velocity [5], acceleration [6], flow [7], temperature [8], strain [9] vibration [10] and bio-sensing [11].…”

Section: Introductionmentioning

confidence: 99%

Integration of Zero Crossing Method in a Nonuniform Sampling System Using Optical Feedback Interferometry

Bazaz,

Fatimah,

Asim

et al. 2023

IEEE Sensors J.

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In this paper, a zero-crossings based method is proposed to improve the displacement sensing performance of nonuniform sampling (NUS) theory based use of optical feedback interferometry (OFI) under moderate optical feedback regime. The incorporation of zero-crossings as phase quantization levels allows doubling the samples for subsequent interpolation, without using any dithering scheme. When compared to the simple dither-free NUS method, the proposed method yields an overall improvement in RMS error over a wide range of target motion amplitudes and frequencies, with maximum improvement at low amplitudes. Experimentally, an improvement of up to 87% is obtained in precision as compared to simple NUS system for an OFI sensor with laser wavelength of 785 nm.

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“…A variety of methods to measure acceleration with high resolution were proposed and implemented based on principles of mechanical [7], optical [8,9], and electrical detection. The quartz flexure accelerometer measures acceleration by detecting changes in the relative position of the sensitive quartz pendulum, which has low friction torque, mechanical bias error, and temperature drift.…”

Section: Introductionmentioning

confidence: 99%

High-Precision Acceleration Measurement System Based on Tunnel Magneto-Resistance Effect

Gao

Chen

Yao

et al. 2020

Sensors

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A high-precision acceleration measurement system based on an ultra-sensitive tunnel magneto-resistance (TMR) sensor is presented in this paper. A “force–magnetic–electric” coupling structure that converts an input acceleration into a change in magnetic field around the TMR sensor is designed. In such a structure, a micro-cantilever is integrated with a magnetic field source on its tip. Under an acceleration, the mechanical displacement of the cantilever causes a change in the spatial magnetic field sensed by the TMR sensor. The TMR sensor is constructed with a Wheatstone bridge structure to achieve an enhanced sensitivity. Meanwhile, a low-noise differential circuit is developed for the proposed system to further improve the precision of the measured acceleration. The experimental results show that the micro-system achieves a measurement resolution of 19 μg/√Hz at 1 Hz, a scale factor of 191 mV/g within a range of ± 2 g, and a bias instability of 38 μg (Allan variance). The noise sources of the proposed system are thoroughly investigated, which shows that low-frequency 1/f noise is the dominant noise source. We propose to use a high-frequency modulation technique to suppress the 1/f noise effectively. Measurement results show that the 1/f noise is suppressed about 8.6-fold at 1 Hz and the proposed system resolution can be improved to 2.2 μg/√Hz theoretically with this high-frequency modulation technique.

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High resolution quartz flexure accelerometer based on laser self-mixing interferometry

Cited by 8 publications

References 23 publications

Single Chip-Based Nano-Optomechanical Accelerometer Based on Subwavelength Grating Pair and Rotated Serpentine Springs

Single Chip-Based Nano-Optomechanical Accelerometer Based on Subwavelength Grating Pair and Rotated Serpentine Springs

Integration of Zero Crossing Method in a Nonuniform Sampling System Using Optical Feedback Interferometry

High-Precision Acceleration Measurement System Based on Tunnel Magneto-Resistance Effect

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