High-resolution pressure sensor for photo acoustic gas detection

Schjølberg-Henriksen, Kari; Wang, D.T.; Rogne, Henrik; Ferber, Alain; Vogl, Andreas; Moe, Sigurd; Bernstein, Ralph; Lapadatu, Daniel; Sandven, K.; Brida, S.

doi:10.1016/j.sna.2006.02.019

Cited by 14 publications

(14 citation statements)

References 5 publications

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“…Additionally, more companies have since developed their own solutions based on similar principles. With the emergence of microsystems technology, efforts have begun to miniaturize the URAS setup [47][48][49]. To this end, simulations of the sensitivity function of standard NDIR and photoacoustic NDIR underscore the potential for miniaturization [50] and experimental data does support this [51].…”

Section: Indirect Photoacoustic (Ndir Setups)mentioning

confidence: 99%

Photoacoustic-Based Gas Sensing: A Review

Palzer

2020

Sensors

104

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The use of the photoacoustic effect to gauge the concentration of gases is an attractive alternative in the realm of optical detection methods. Even though the effect has been applied for gas sensing for almost a century, its potential for ultra-sensitive and miniaturized devices is still not fully explored. This review article revisits two fundamentally different setups commonly used to build photoacoustic-based gas sensors and presents some distinguished results in terms of sensitivity, ultra-low detection limits, and miniaturization. The review contrasts the two setups in terms of the respective possibilities to tune the selectivity, sensitivity, and potential for miniaturization.

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Section: Indirect Photoacoustic (Ndir Setups)mentioning

confidence: 99%

Photoacoustic-Based Gas Sensing: A Review

Palzer

2020

Sensors

104

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“…As a result, the exposition to harsh environments or the need for non-standard manufacturing processes is limited to a minimum. Earlier studies with pressure or sound transducers directly encapsulated in the gas-filled cell, either needed to use non-standard low-temperature encapsulation processes in gas bias atmospheres individually manufactured samples or harsh process environments [25][26][27][28][29].…”

Section: Discussionmentioning

confidence: 99%

Anodically Bonded Photoacoustic Transducer: An Approach towards Wafer-Level Optical Gas Sensors

Gassner

Schaller

Eberl

et al. 2022

Sensors

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We present a concept for a wafer-level manufactured photoacoustic transducer, suitable to be used in consumer-grade gas sensors. The transducer consists of an anodically bonded two-layer stack of a blank silicon wafer and an 11 µm membrane, which was wet-etched from a borosilicate wafer. The membrane separates two cavities; one of which was hermetically sealed and filled with CO2 during the anodic bonding and acts as an infrared absorber. The second cavity was designed to be connected to a standard MEMS microphone on PCB-level forming an infrared-sensitive photoacoustic detector. CO2 sensors consisting of the detector and a MEMS infrared emitter were built up and characterized towards their sensitivity and noise levels at six different component distance ranging from 3.0 mm to 15.5 mm. The signal response for the sample with the longest absorption path ranged from a decrease of 8.3% at a CO2 concentration of 9400 ppm to a decrease of 0.8% at a concentration of 560 ppm. A standard deviation of the measured values of 18 ppm was determined when the sensor was exposed to 1000 ppm CO2.

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“…Macroscopic sensor systems have also been implemented [12], [13]. In the recently finished, EU-funded NetGas project [12], the partners have been focusing on several components of the PA gas measurement system, including the IR emitter [14], the pressure sensor [15], and the thermopile for long-term drift monitoring [16]. In this paper, the performance of a photoacoustic sensor system using the components [14]- [16] is evaluated.…”

Section: Photoacoustic Operating Principlementioning

confidence: 99%

“…The middle silicon wafer had a patented, sensitive, bossed membrane with implanted piezoresistors in a Wheatstone bridge configuration [17]. The sensitivity of the pressure sensor was measured as the output voltage per bridge voltage and pressure, and was 10 V/V Pa [15]. Details on the fabrication and measurement of the pressure sensor element can be found in [15].…”

Section: Sensor Manufacturingmentioning

confidence: 99%

Sensitive and Selective Photoacoustic Gas Sensor Suitable for High-Volume Manufacturing

et al. 2008

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Sensitive and selective gas measurements are crucial for a large variety of applications. This paper describes the manufacturing and characterization of a photoacoustic gas sensor system. The system is based on a pressure sensor element with a sensitivity of 10 V/V/Pa. To demonstrate and evaluate the concept, 12 prototypes for measuring CO 2 have been manufactured and characterized. Detection limits ranging from 92 ppm to below 6 ppm CO 2 were obtained with a path length of 10 cm, depending on the measurement time and photoacoustic cell design. Measurements showed no cross-sensitivity towards CO, CH 4 , or humidity in any of the sensors. The temperature drift of the uncompensated raw signal of two sensor designs was below 117 ppm CO 2 in the range from 25 C to 50 C.Karl-Heinz Suphan began his career in 1981 as Engineer for R&D of hybrid circuits. In 1992, he joined Micro-Hybrid Electronic GmbH, Hermsdorf, Germany, and realized different projects in special applications of hybrid thickfilm technology. In 2000 he became a Senior Project Manager R&D. In this role, he is responsible for customer specific developments and technological projects.Dag T. Wang received the Ph.D. degree from the Norwegian University of Science and Technology in 1997 for work on disorder in semiconductors.He is currently a Chief Scientist at the Department of Microsystems and Nanotechnology at SINTEF, Oslo, Norway, specializing in design and fabrication of MEMS-based sensors. fields of expertise are within microsystem technology (MST), MEMS design with a special focus on gas sensor, bioMEMS, and fingerprint sensors. He is currently the CTO of the Norwegian company IDEX ASA supplying fingerprint sensor technology, and he holds a part-time adjunct professor position at NTNU.

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High-resolution pressure sensor for photo acoustic gas detection

Cited by 14 publications

References 5 publications

Photoacoustic-Based Gas Sensing: A Review

Photoacoustic-Based Gas Sensing: A Review

Anodically Bonded Photoacoustic Transducer: An Approach towards Wafer-Level Optical Gas Sensors

Sensitive and Selective Photoacoustic Gas Sensor Suitable for High-Volume Manufacturing

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