High‐Resolution Patterning of Conductive Microstructures by Electrostatic Deposition of Aerosol Au Nanoparticles through the Dielectric Mask
Alexey Efimov,
Anton Patarashvili,
Dmitry Maslennikov
et al.
Abstract:A new approach of electrostatically focusing nanoparticles through an electrical tape mask to form narrow <10 μm and conductive microstructures is developed and investigated in this work. The presented approach is similar to deposition of material through a stencil and allows one to obtain lines 15 times smaller than the width of the gap in the mask. It is proposed to use ordinary PVC electrical tape as a mask instead of expensive photo or electronic resists. The work investigated the influence of a mask th… Show more
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