Optical Interference Coatings Conference (OIC) 2019 2019
DOI: 10.1364/oic.2019.wa.7
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High-Resolution Optical Broadband Monitoring for the Production of Miniaturized Thin-Film Filters

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Cited by 4 publications
(4 citation statements)
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“…The total design coating thickness was 22.87 µm, and the individual layer thicknesses were below 390 nm. A high layer thickness accuracy was maintained during the IBS coating production by in situ high-resolution broadband monitoring [15] based on transmission measurements on a fused silica sample placed in the same substrate holder as the PVA coated silicon wafers and is simultaneously coated. We observed a good adhesion of the first sputtered layer (TiO 2 ) to the sacrificial PVA layer.…”
Section: B Ibs Thin-film Filtermentioning
confidence: 99%
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“…The total design coating thickness was 22.87 µm, and the individual layer thicknesses were below 390 nm. A high layer thickness accuracy was maintained during the IBS coating production by in situ high-resolution broadband monitoring [15] based on transmission measurements on a fused silica sample placed in the same substrate holder as the PVA coated silicon wafers and is simultaneously coated. We observed a good adhesion of the first sputtered layer (TiO 2 ) to the sacrificial PVA layer.…”
Section: B Ibs Thin-film Filtermentioning
confidence: 99%
“…We have previously reported on our miniaturized thin-film filters on a polymer substrate [15], where the spin coated polymer layer is of optical quality and has a typical thickness of 4 µm. To compare these to the novel type of filters, we considered the case of two standard single-mode fibers with FC/PC connectors with a miniaturized CWDM filter element for 1311 nm with an edge length of 250 µm placed between the facets of the fibers.…”
Section: Comparison To Miniaturized Filters On Polymer Substratementioning
confidence: 99%
“…The filter design was deposited on sacrificial substrates in an ion beam sputtering process [35]. To achieve a high layer thickness accuracy, in situ process control with a high resolution optical broadband monitor was used [37]. With this monitoring system, the layer thicknesses are calculated from in situ transmission measurements on a fused silica sample.…”
Section: Thin-film Filtermentioning
confidence: 99%
“…The ITO target consisted of 90 % indium and 10 % tin. The layer thicknesses were controlled via an in-situ broadband monitor measuring the transmission of the coated samples [18]. The actual design presented in this work is based on a (HL) 6 ITO(LH) 6 structure, with an initial thickness of the ITO-layer of 2 QWOT.…”
Section: Coating Materials and Manufacturingmentioning
confidence: 99%