High-Resolution Nanophotolithography in Atomic Force Microscopy Contact Mode

Gilbert, Yann; Fikri, Radouane; Ruymantseva, Anna; Lerondel, Gilles; Bachelot, Renaud; Barchiesi, Dominique; Royer, Pascal

doi:10.1021/ma035437g

Cited by 8 publications

(3 citation statements)

References 29 publications

(48 reference statements)

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“…Nanopatterning of azopolymers by SPL has been studied by several authors . Figure shows an AFM image of a surface deformation photoinduced on an azopolymer film (PMA‐DR1) with a silver‐coated AFM tip in a near‐field configuration as schematically depicted in Fig.…”

Section: Photomechanics and Photofluidization In Azopolymersmentioning

confidence: 99%

Laser nanofabrication in photoresists and azopolymers

Sekkat

Kawata

2013

Laser & Photonics Reviews

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Recent progress in the field of single‐ and two‐photon nanofabrication, both 2‐ and 3‐dimensional, in photopolymerizable resins and in films of photoisomerizable azopolymers are reviewed. The basic processes as well as technological advances and applications of nanofabrication by light are discussed. Recent advances and achievements in polymer photomechanics and light‐activated molecular movement in azopolymers are also reviewed.

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Section: Photomechanics and Photofluidization In Azopolymersmentioning

confidence: 99%

Laser nanofabrication in photoresists and azopolymers

Sekkat

Kawata

2013

Laser & Photonics Reviews

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“…Near-field optics can confine photons to several tens of nm near the probe tip end and induce nanoscale deformation on the film surface. An apertureless type probe, i.e., metal coated tip which principally generates a smaller light spot than the aperture type probe has also been used [5,[21][22][23]. There are few reports on the mechanism of the near-field surface deformation because efforts were mainly devoted to making smaller fine structures on the surface of polymer films for nano fabrication.…”

Section: Single Two - and Multi-photon Driven Molecular Motion And Na...mentioning

confidence: 99%

Single-, two-, and multi-photon driven molecular motion and nanopatterning in azo-polymer films

et al. 2011

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We review our work on nanopatterning in azo-polymer films by single, two-and multi-phopton driven molecular motion in solid bulk polymer. It is now known that light induced molecular movement occurs below the polymer glass transition temperature by chromophores photoisomerization via either linear or nonlinear absorption, and in this paper we will show that nanoscale polymer movement is induced by a tightly focused laser beam in an azo-polymer film just at the diffraction limit of light. The deformation pattern which is produced by photoisomerization of the azo dye is strongly dependent on the incident laser polarization and the longitudinal focus position of the laser beam along the optical axis. The anisotropic nanofluidity of the polymer film and the optical gradient force played important roles in the light induced polymer movement. We explored the limits of the size of the photo-induced deformation, and we found that the deformation depends on the laser intensity and the exposure time. The smallest deformation size achieved was 200 nm in full width of half maximum; a value which is nearly equal to the size of the diffraction limited laser spot. Furthermore, a nano protrusion was optically induced on the surface of the films, beyond the limit of light diffraction, by metal tip enhanced near-filed illumination. A silver coated tip was located inside the diffraction limited spot of a focused laser beam (460 nm), and an enhanced near-field, with 30 nm light spot, was generated in the vicinity of the tip due to localized surface plasmons. The incident light intensity was carefully regulated to induce surface nanodeformation by such a near-field spot. A nano protrusion with 47 nm full width of half maximum and 7 nm height was induced. The protrusion occurs because the film is attracted towards the tip end during irradiation. At the top of the protrusion, an anisotropic nanomovement of the polymer occurs in a direction nearly parallel to the polarization of the incident light, and suggests the existence at the tip end of not only a longitudinal, i.e., along the tip long axis, but also a lateral component of the electric field of light. The azo-polymer film helps map the electric field in the close vicinity of the tip. We also report on two-photon patterning of the films. Exposure of azo polymer films, which absorb in the visible range (λ max = 480 nm), to intense 920 nm irradiation leads to polarization dependent patterning which are associated with polymer nanomovement caused by photoselective two-photon cis ↔ trans isomerization, while irradiation at 780 nm induces multi-photon bleaching of the azo chromophore. These wavelengths hit bleaching and isomerization pathways in the chromophore, respectively.

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“…An apertureless type probe, i.e., metal coated tip which principally generates the smaller light spot than the aperture type probe has also been used. [14][15][16][17] There are few reports on the mechanism of the near-field surface deformation because efforts have been mainly devoted to making smaller fine structures on the surface of polymer films for nanofabrication. Recently, Gilbert et al reported on the near-field surface deformations induced with a gold tip in a highly focused laser beam, whereby both the far-and near-field components of the light affected surface deformation due to a high irradiation intensity ͑typically, 30 kW/ cm 2 ͒.…”

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confidence: 99%

Nanomovement of azo polymers induced by metal tip enhanced near-field irradiation

Ishitobi

Tanabe

Sekkat

et al. 2007

Applied Physics Letters

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Nanomovement of azo polymers induced by metal tip enhanced near-field illumination was studied. A protrusion with 47nm full width at half maximum was induced with a resolution beyond the diffraction limit. At the top of the protrusion, an anisotropic movement occurs in a direction nearly parallel to the polarization of the incident light, and suggests the existence at the tip end of not only a longitudinal but also a lateral component of the electric field of light. The anisotropic photofluidity and the optical gradient force played important roles in the process of the light induced polymer movement.

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High-Resolution Nanophotolithography in Atomic Force Microscopy Contact Mode

Cited by 8 publications

References 29 publications

Laser nanofabrication in photoresists and azopolymers

Laser nanofabrication in photoresists and azopolymers

Single-, two-, and multi-photon driven molecular motion and nanopatterning in azo-polymer films

Nanomovement of azo polymers induced by metal tip enhanced near-field irradiation

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