“…Most temperature sensors are available for MEMS -based microscale measurements, and not all of them have the desired integration with the CMOS technology, to feature essential functions such as amplification and signal conditioning [ 11 , 15 , 17 , 27 , 28 , 29 , 30 , 31 , 32 , 33 , 34 , 35 , 36 ]. Furthermore, there have been developments in the nanoscale thermal sensing [ 37 , 38 , 39 , 40 , 41 ]. Some of these nanoscale sensors are used in contact with the measured sample [ 27 , 28 , 31 , 33 , 34 , 36 , 37 , 38 ].…”