High Resolution, High Frequency Ultrasonic Ranging in Air with pMUTs

Koh, Youngil; Choong, David Sze Wai; Chen, Ssu-Han; Goh, Duan Jian; Ghosh, Sagnik; Sharma, Jaibir; Merugu, Srinivas; Quaglia, Fabio; Ferrera, Marco; Savoia, Alessandro Stuart; Ng, Eldwin J.

doi:10.1109/ius52206.2021.9593707

Cited by 13 publications

(2 citation statements)

References 9 publications

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“…R. Przybyla et al developed the first pMUT rangefinder system based on the cross-correlation TOF method as early as 2010 [ 33 ]. Many recent works also use cross correlation to obtain the detection range [ 31 , 106 ].…”

Section: Advancements Of Pmut Rangefinders Based On Improvements Of R...mentioning

confidence: 99%

Review of Piezoelectric Micromachined Ultrasonic Transducers for Rangefinders

et al. 2023

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Piezoelectric micromachined ultrasonic transducer (pMUT) rangefinders have been rapidly developed in the last decade. With high output pressure to enable long-range detection and low power consumption (16 μW for over 1 m range detection has been reported), pMUT rangefinders have drawn extensive attention to mobile range-finding. pMUT rangefinders with different strategies to enhance range-finding performance have been developed, including the utilization of pMUT arrays, advanced device structures, and novel piezoelectric materials, and the improvements of range-finding methods. This work briefly introduces the working principle of pMUT rangefinders and then provides an extensive overview of recent advancements that improve the performance of pMUT rangefinders, including advanced pMUT devices and range-finding methods used in pMUT rangefinder systems. Finally, several derivative systems of pMUT rangefinders enabling pMUT rangefinders for broader applications are presented.

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Section: Advancements Of Pmut Rangefinders Based On Improvements Of R...mentioning

confidence: 99%

Review of Piezoelectric Micromachined Ultrasonic Transducers for Rangefinders

et al. 2023

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“…Nevertheless, typical PMUTs usually suffer from a narrow fractional bandwidth (FBW) (typically <50%) or a high mechanical quality factor (Q), which could lead to limited ranging performance [15]. On the one hand, a long ring-down will be generated due to the low energy dissipation in air, which increases the possibility of overlapping echoes and causes difficulties in signal processing.…”

Section: Introductionmentioning

confidence: 99%

Small blind-area, high-accuracy ultrasonic rangefinder using a broadband multi-frequency piezoelectric micromachined ultrasonic transducer array

Luo,

He,

Wang

et al. 2023

Meas. Sci. Technol.

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This paper presents a broadband ultrasonic rangefinder, with merits of a small blind area and high accuracy, based on a multi-frequency piezoelectric micromachined ultrasonic transducer (MF-PMUT) array. The coupling bandwidth between six types of resonant cells with adjacent resonant frequencies was studied and optimized, and these cells were then integrated into an array to broaden the bandwidth of the device. The array device showed a wide −6 dB fractional bandwidth of 108% in silicon oil. A wide bandwidth can contribute to obtaining the maximum steady-state with less excitation and reducing its residual ring-down, resulting in a small blind area. Pulse-echo ranging experiments demonstrated that the blind area was effectively reduced to 5 mm due to the multi-frequency array. For short distance measurements (<250 mm), the error was well controlled within ±0.3 mm and the 3σ accuracy was 0.445 mm. Compared with earlier reported PMUTs designed for bandwidth enhancement, the proposed broadband MF-PMUT array is much simpler in design and fabrication, revealing it as a promising candidate for short-distance high-accuracy measurements.

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