2010
DOI: 10.2971/jeos.2010.10035s
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High resolution displacement detection by speckle pattern analysis : accuracy limits in linear displacement speckle metrology

Abstract: We propose a simple reflection measurement setup and a motion evaluation procedure based on a two dimensional recording of subsequent speckle images. The averaging of cross correlation functions is used to measure displacements. We demonstrate experimentally a 10 nm precision on a 50 µm measurement range limited by systematical errors. An image library is proposed to extend the measurement range. Limitations are given and documented improvements predicted an accuracy better than 5 nm over a range of 150 µm.

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Cited by 5 publications
(6 citation statements)
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“…The EZNCC algorithm is more straightforward to implement than fringe and phase-based analyses 3 ; besides, it surpasses the limits of traditional correlation computing, ensures high sensitivity, and avoids additional calibration points for large displacements. 10 Notwithstanding its merits, current algorithms with subpixel capabilities may outperform the EZNCC resolution. For instance, experimental results with 2D cross-correlation enabled ≤0.5 μm resolution over a 1000 μm range, 16 whereas theoretical analyses F I G U R E 2 Zero-mean normalized correlation (ZNCC) and extended zero-mean normalized cross-correlation (EZNCC) as a function of the displacement u.…”
Section: Displacementmentioning
confidence: 99%
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“…The EZNCC algorithm is more straightforward to implement than fringe and phase-based analyses 3 ; besides, it surpasses the limits of traditional correlation computing, ensures high sensitivity, and avoids additional calibration points for large displacements. 10 Notwithstanding its merits, current algorithms with subpixel capabilities may outperform the EZNCC resolution. For instance, experimental results with 2D cross-correlation enabled ≤0.5 μm resolution over a 1000 μm range, 16 whereas theoretical analyses F I G U R E 2 Zero-mean normalized correlation (ZNCC) and extended zero-mean normalized cross-correlation (EZNCC) as a function of the displacement u.…”
Section: Displacementmentioning
confidence: 99%
“…9 Concerning displacement measurements, using additional calibration images allows for subtly extending the range; this approach becomes unfeasible as the measured distance increases. 10 Another attempt comprises choosing the laser wavelength or incidence angle to enhance the contrast of speckle granules, which demands intensive calibrations for every sample. 11,12 Deep learning algorithms have been applied to several speckle metrology setups as an alternative to improve the measurement resolution and dynamic range.…”
Section: Introductionmentioning
confidence: 99%
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“…Although well understood, the techniques have only recently become viable for practical applications in manufacturing and robotics due to advances in camera and signal processing technology. This has led to renewed interest in the technique with researchers investigating new applications in robotics vehicle odometry [11,12] and robotic positioning and stabilisation applications [13,14].…”
Section: Introductionmentioning
confidence: 99%
“…Integrated micro-components can be monitored and controlled using reflectance measurements as presented by Piombini et al (Toward the reflectance measurement of micro components) [3]. Speckle formation during laser beam reflection can also be a very sophisticated tool for detecting ultra-precise displacements, as presented by Filter et al (High resolution displacement detection with speckles : accuracy limits in linear displacement speckle metrology) [4].…”
mentioning
confidence: 99%