Abstract:Abstract. We report a high recyclability and fast charging/discharging speed of a thin silicon/carbon anode, which can implement direct prototyping of three dimensional (3D) microbattery on chip. The silicon/carbon material uses SU-8 as carbon source, and forms Si/void/C structure to provide enough space for volume expansion of the SiNPs during lithium-ion intercalation. By using roll forming, the anode has been demonstrated to enjoy the superior recyclability (563.42 mAh/g in the third cycle, while 472.96 mAh… Show more
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