High-rate deposition of Sb-doped SnO2 films by reactive sputtering using the impedance control method

Preparation and properties of antimony doped tin oxide nanopowders and their conductivity

“…In the co-precipitation reaction of the tin-antimony mixed salt ethanol solution with NH 4 HCO 3 , since NH 4 HCO 3 is insoluble in ethanol, the hydrolysis reaction occurs in the solid-liquid interface, and the generated Sn(OH) 4 and Sb(OH) 3 …”

“…By the means of dispersing and adding ATO nanopowders to various types of coatings, the transparent multifunctional film materials with thermal insulation and conduction are prepared [2][3][4], which can be widely applied in the field of Environmental…”

Thermophysical properties of SnO2-based transparent conductive films: Effect of dopant species and structure compared with In2O3-, ZnO-, and TiO2-based films

“…SnO 2 -based transparent conductive oxide (TCO) films, such as Sb-doped SnO 2 (ATO), [1][2][3][4][5][6][7] are the most chemically stable among TCO materials-an important prerequisite for several applications, such as solar cells. However, as Sb is undesirable for industrial applications because of its toxicity, it is important to find alternative doping materials.…”

Detailed investigation of submicrometer-sized grains of chemically sprayed (Sn1−xAlx, O2) (0≤x≤0.085) thin films

“…It is well known that SnO 2 is a semiconductor that crystallizes in a tetragonal rutile structure [3]. SnO 2 films were grown by various processes like chemical precipitation route [4], chemical vapor deposition (CVD) [5], sputtering [6,7], sol-gel [8], pulsed laser deposition (PLD) [9], and spray pyrolysis deposition (SPD) [2,10,11]. This latter is a chemical deposition technique in which fine droplets of a solution containing desired species are sprayed on a preheated substrate.…”