2021
DOI: 10.1364/ao.422078
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High-quality welding of glass by a femtosecond laser assisted with silver nanofilm

Abstract: Glass products with high joint strength are highly demanded in the field of microelectromechanical system (MEMS). While the quality requirement of MEMS is getting higher and higher, much attention has been paid to further improving the welding strength of the glass. Herein, a femtosecond laser welding method assisted by silver nanofilm for quartz glass is proposed. To optimize the welding results, the influence of the laser power on the location of the heat-affected zone is studied. The effect of coated silver… Show more

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Cited by 10 publications
(5 citation statements)
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“…Devices consisting of glass and metal are widely applied to many fields including semiconductor devices, automotive manufacturing, medical equipment, micro electro mechanical system, etc [1][2][3][4]. With the miniaturisation and the expansion of application fields of these devices, micro-joining between glass and metal is becoming one of the indispensable techniques for assembling and hermetic sealing of micro-components [5][6][7].…”
Section: Introductionmentioning
confidence: 99%
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“…Devices consisting of glass and metal are widely applied to many fields including semiconductor devices, automotive manufacturing, medical equipment, micro electro mechanical system, etc [1][2][3][4]. With the miniaturisation and the expansion of application fields of these devices, micro-joining between glass and metal is becoming one of the indispensable techniques for assembling and hermetic sealing of micro-components [5][6][7].…”
Section: Introductionmentioning
confidence: 99%
“…The development of these methods has been hindered because of such disadvantages as joining layer aging, poor high temperature resistance, different thermal expansion coefficients and low processing accuracy. It is difficult for these conventional methods to meet the challenge of micro-joining [1,5,7].…”
Section: Introductionmentioning
confidence: 99%
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“…Additionally, the beam quality better than 1.3 was obtained. This high peak power CPA system with excellent comprehensive parameters will find various applications in scientific research and industrial applications.Index Terms-single crystal fiber; high peak power; chirped pulse amplification; high-order dispersion compensation.N the last decade, ultrafast lasers have found various applications in science and industry, e.g., attosecond generation[1], THz generation[2], ultrafast pump-probe spectroscopy[3], angle resolved photoemission spectroscopy [4], and material precision machining [5][6][7][8]. Most of these femtosecond lasers are configured in chirped pulse amplification architectures.…”
mentioning
confidence: 99%
“…N the last decade, ultrafast lasers have found various applications in science and industry, e.g., attosecond generation[1], THz generation[2], ultrafast pump-probe spectroscopy[3], angle resolved photoemission spectroscopy [4], and material precision machining [5][6][7][8]. Most of these femtosecond lasers are configured in chirped pulse amplification architectures.…”
mentioning
confidence: 99%