High quality transparent heat reflectors of reactively evaporated indium tin oxide

Abstract

Transparent and heat reflecting indium tin oxide films were prepared by electron beam evaporation of In2O3+9 mol.% SnO2 onto glass in an oxygen atmosphere of ∼5×10−4 Torr. Visible light absorption less than 2%, thermal infrared reflectance exceeding 90%, and a dc resistivity of ∼3×10−4 Ω cm were obtained for 0.3-μm-thick films deposited on a substrate at 300 °C. Similar properties could be achieved with substrate temperatures as low as 150 °C. By antireflection coating the films with an MgF2 layer, the visible transmittance exceeded the transmittance of the uncoated glass while the infrared reflectance was practically unchanged.

Whiskers in indium tin oxide films obtained by electron beam evaporation

“…Its use as an optical memory element by using the bleaching of dark ITO when illuminated with a laser has been suggested. 1 By electron beam evaporation, Hamberg and coworkers 2,3 have obtained ITO with low absorption in the visible (Ϸ2%) high reflectance in the thermal infrared ͑90%͒, and resistivity of 3ϫ10 Ϫ4 ⍀ cm. Other conditions were a partial pressure of O 2 of 5ϫ10 Ϫ4 Torr and substrate temperature (T s ͒ in the range of 150-350°C.…”

Highly Infrared Reflective Behavior of Transparent Conductive ZnO:Ga Films Synthesized by DC Reactive Magnetron Sputtering

“…[25] In the model of Drude, the cutoff wavelength l p is related to the free-electron concentration N e by Equation (3) [26] …”

High Sensitivity Refractive Index Sensor by D-Shaped Fibers and Titanium Dioxide Nanofilm

“…It should be noted that the dielectric constant was predicted by the Drude model [17]. The plasma frequency is determined by the following formula:…”