2011
DOI: 10.1016/j.tsf.2011.01.326
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High-quality single-walled carbon nanotubes synthesis by hot filament CVD on Ru nanoparticle catalyst

Abstract: We investigated the single-walled carbon nanotubes (SWCNTs) growth on Ru nanoparticle catalyst via hot filament assisted chemical vapor deposition (HFCVD) with two independent W filaments for the carbon precursor (methane) and the hydrogen dissociation respectively. The Ru nanoparticles were obtained following a two-step strategy. At first the growth substrate is functionalized by silanisation, then a self assembly of a ruthenium porphyrin complex monolayer on pyridine-functionalized metal oxide substrates. We… Show more

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Cited by 17 publications
(12 citation statements)
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“…Each of the five bimetallic catalyst systems have been tested for SWCNT growth using the d-HFCVD process previously described. [27] The presence of SWCNTs grown on the wafer surfaces in relatively large quantity is sustained through a SEM study and is an indication of the good efficiency of this new catalyst family for the growth of SWCNTs (see Fig. 8a and 8d and Fig.…”
Section: Swcnt Growthmentioning
confidence: 80%
See 1 more Smart Citation
“…Each of the five bimetallic catalyst systems have been tested for SWCNT growth using the d-HFCVD process previously described. [27] The presence of SWCNTs grown on the wafer surfaces in relatively large quantity is sustained through a SEM study and is an indication of the good efficiency of this new catalyst family for the growth of SWCNTs (see Fig. 8a and 8d and Fig.…”
Section: Swcnt Growthmentioning
confidence: 80%
“…The global multistep process leading to the growth of SWCNTs [27], [28] from PBA precursors is shown in Fig. 2 Details on the various steps of this process are provided in the following paragraphs.…”
Section: Methodsmentioning
confidence: 99%
“…In HFCVD, a relatively inexpensive substrate can be used to produce CNT. Bouanis et al [41] fabricated SWCNTs by the HFCVD method. They used Ru nanoparticle as a catalyst and methane gas as a carbon source heated by a 2 W filament.…”
Section: Carbon Nanotubesmentioning
confidence: 99%
“…24. 159 Self assembled monolayers of Ru tetraphenyl porphyrins (RuTPP) were used as catalyst on the SiO 2 /Si(100) growth substrates pre-functionalized by silanization to form a pyridine terminated molecular monolayer by HFCVD (hot lament CVD). Recently, nanoparticles from dodecatriruthenium dodecacarbonyl Ru 3 (CO) 12 65 were also explored for ruthenium deposition on SiO 2 /Si(001) substrates at 473 K with and without an overpressure of CO by Liao et al 160 A highly smooth thin lm is obtained by carbon monoxide addition during growth.…”
Section: (D) Miscellaneous Ruthenium Cvd Precursorsmentioning
confidence: 99%