High Quality Nanogratings Far Beyond Diffraction Limits on Silicon Efficiently Fabricated Using Femtosecond Laser Dual-Beam Interference Direct Writing

Jia, Tianqing; Li, Kang; Han, Ruozhong; Suo, Mengqi; Long, Mingquan; Chen, Long; Cao, Kaiqiang; Zhang, Shian; Feng, Donghai; Sun, Zhenrong; Xu, Hongxing

doi:10.2139/ssrn.4798607

2024

DOI: 10.2139/ssrn.4798607

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High Quality Nanogratings Far Beyond Diffraction Limits on Silicon Efficiently Fabricated Using Femtosecond Laser Dual-Beam Interference Direct Writing

Tianqing Jia,

Kang Li,

Ruozhong Han

et al.

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High Quality Nanogratings Far Beyond Diffraction Limits on Silicon Efficiently Fabricated Using Femtosecond Laser Dual-Beam Interference Direct Writing

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