High quality mechanical and optical properties of commercial silicon nitride membranes

Zwickl, Benjamin M.; Shanks, Will; Jayich, Ania; Yang, Cheng; Thompson, J. D.; Harris, Jack

doi:10.1063/1.2884191

Cited by 214 publications

(209 citation statements)

References 27 publications

(27 reference statements)

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“…These structures are fabricated by coating silicon wafers with around 100 nm of high-stress silicon nitride and then etching the silicon in a 100 μm × 100 μm region to reveal a free-standing membrane. Quality factors exceeding 10 6 have been demonstrated with similar SiN membranes for resonance frequencies in the range of 500 kHz [17].…”

Section: Appendix D: Experimental Implementationmentioning

confidence: 95%

Quantum-measurement backaction from a Bose-Einstein condensate coupled to a mechanical oscillator

et al. 2011

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We study theoretically the dynamics of a hybrid optomechanical system consisting of a macroscopic mechanical membrane magnetically coupled to a spinor Bose-Einstein condensate via a nanomagnet attached at the membrane center. We demonstrate that this coupling permits us to monitor indirectly the center-of-mass position of the membrane via measurements of the spin of the condensed atoms. These measurements normally induce a significant backaction on the membrane motion, which we quantify for the cases of thermal and coherent initial states of the membrane. We discuss the possibility of measuring this quantum backaction via repeated measurements. We also investigate the potential to generate nonclassical states of the membrane, in particular Schrödinger-cat states, via such repeated measurements.

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Section: Appendix D: Experimental Implementationmentioning

confidence: 95%

Quantum-measurement backaction from a Bose-Einstein condensate coupled to a mechanical oscillator

et al. 2011

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“…Stoichiometric high tensile stress ($1.0 GPa) silicon nitride membranes and string resonators have shown extremely high mechanical quality factors (Q > 1 000 000) at room temperature [1][2][3][4][5][6] and are useful for force and mass sensing experiments. 2,7,8 These silicon nitride membranes are being increasingly used in high finesse optical cavities where their low spring constant and high mechanical quality factors prove ideal for realizing dispersive optomechanical experiments.…”

Section: Introductionmentioning

confidence: 99%

Approaching intrinsic performance in ultra-thin silicon nitride drum resonators

Adiga

Ilic

Barton

et al. 2012

Journal of Applied Physics

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Two orders of magnitude increase in metal piezoresistor sensitivity through nanoscale inhomogenization J. Appl. Phys. 112, 084332 (2012) Gold coating of micromechanical DNA biosensors by pulsed laser deposition J. Appl. Phys. 112, 084330 (2012) Hand-powered microfluidics: A membrane pump with a patient-to-chip syringe interface Biomicrofluidics 6, 044102 (2012) High quality factor single-crystal diamond mechanical resonators Appl. Phys. Lett. 101, 163505 (2012) Additional information on J. Appl. Phys. We have fabricated circular silicon nitride drums of varying diameter (20 lm to 1 mm) and thickness (15 nm-75 nm) using electron beam lithography and measured the dissipation (Q À1) of these amorphous silicon nitride resonators using optical interferometric detection. We observe that the dissipation is strongly dependent on mode type for relatively large, thick membranes as predicted by the current models of dissipation due to clamping loss. However, this dependence is drastically reduced for smaller or thinner resonators, with thinner resonators showing higher quality factors, for low order modes. Highest quality factors that can be reached for these thin resonators seems be limited by an intrinsic mechanism and scales linearly with the diameter of the membrane. Our results are promising for mass sensing and optomechanical applications where low mass and high Qs are desirable. V C 2012 American Institute of Physics. [http://dx

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“…The SiN membrane used in our experiment has dimensions of 0.5mm × 0.5mm × 50 nm and a tensile stress of about 120 MPa [28]. Its fundamental vibrational mode has a measured frequency of m /2 = 272 kHz and an effective mass of M = 1 × 10 −11 kg.…”

Section: Sin Membranementioning

confidence: 99%

“…Silicon nitride (SiN) membranes have garnered a great deal of interest in optomechanics experiments owing to their extraordinary mechanical and optical properties [28][29][30][31][32]. The SiN membrane used in our experiment has dimensions of 0.5mm × 0.5mm × 50 nm and a tensile stress of about 120 MPa [28].…”

Section: Sin Membranementioning

confidence: 99%

Hybrid atom-membrane optomechanics

Korppi

Jöckel

Rakher

et al. 2013

EPJ Web of Conferences

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Abstract. We report on the realization of a hybrid optomechanical system in which ultracold atoms are coupled to a micromechanical membrane. The atoms are trapped in the intensity maxima of an optical standing wave formed by retroreflection of a laser beam from the membrane surface. Vibrations of the membrane displace the standing wave, thus coupling to the center-of-mass motion of the atomic ensemble. Conversely, atoms imprint their motion onto the laser light, thereby modulating the radiation pressure force on the membrane. In this way, the laser light mediates a long-distance coherent coupling between the two systems. When the trap frequency of the atoms is matched to the membrane frequency, we observe resonant energy transfer. Moreover, we demonstrate sympathetic damping of the membrane motion by coupling it to laser-cooled atoms. Theoretical investigations show that the coupling strength can be considerably enhanced by placing the membrane inside an optical cavity. This could lead to quantum coherent coupling and ground-state cooling of the membrane via a distant atomic ensemble.

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High quality mechanical and optical properties of commercial silicon nitride membranes

Cited by 214 publications

References 27 publications

Quantum-measurement backaction from a Bose-Einstein condensate coupled to a mechanical oscillator

Quantum-measurement backaction from a Bose-Einstein condensate coupled to a mechanical oscillator

Approaching intrinsic performance in ultra-thin silicon nitride drum resonators

Hybrid atom-membrane optomechanics

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