High-quality indium–gallium–zinc oxide films synthesized by atomic layer deposition using a single cocktail precursor based on a liquid-delivery system and their application in transistors and inverters
Sang-Joon Park,
Se-Ryong Park,
Woo-Seok Jeon
et al.
Abstract:High-quality indium-gallium-zinc oxide (IGZO) films synthesized by atomic layer deposition (ALD) using a single cocktail precursor based on a liquid-delivery system are demonstrated for the first time. A bottom-gate-top-contact thin-film...
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