High-quality indium–gallium–zinc oxide films synthesized by atomic layer deposition using a single cocktail precursor based on a liquid-delivery system and their application in transistors and inverters

Abstract

High-quality indium-gallium-zinc oxide (IGZO) films synthesized by atomic layer deposition (ALD) using a single cocktail precursor based on a liquid-delivery system are demonstrated for the first time. A bottom-gate-top-contact thin-film...