High-quality high-throughput silicon laser milling using a 1 kW sub-picosecond laser

Holder, Daniel; Weber, Rudolf; Röcker, Christoph; Kunz, Gerhard; Bruneel, David; Delaigue, Martin; Graf, Thomas; Ahmed, Marwan Abdou

doi:10.1364/ol.411412

Cited by 22 publications

(14 citation statements)

References 19 publications

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“…The enhanced ablation efficiency due to heat accumulation was observed in the processing of diamond-like nanocomposite (DLN) a-C:H:Si:O films with a femtosecond laser in the burst mode [46]. The high-quality high-throughput laser milling of silicon of 230 mm 3 /min was achieved with a sub-ps laser delivering more than 1 kW of average laser power working in the five-pulse burst regime and limiting the peak fluence to approximately 0.7J/cm 2 by expanding the beam diameter [109].…”

Section: A High-throughput and Precision Ablation Of Metalsmentioning

confidence: 99%

Ultra-Short Pulse Lasers for Microfabrication: A Review

Račiukaitis

2021

IEEE J. Select. Topics Quantum Electron.

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Ultra-short pulse lasers, generating coherent light pulses with pulse durations in the picosecond and femtosecond range, are becoming popular in precision laser microfabrication. They are benefiting not only from well-predicted laser ablation with the suppressed heat-affected zone but also by opening new processing opportunities, especially in transparent materials, due to enhanced non-linear interaction with the material. In this review, the evolution of various kinds of mode-locked lasers from a scientific toy to a robust industrial tool is reviewed. The utilization benefits of high-average-power, high-pulse-repetition-rate ultra-short pulse laser are closely related to beam shaping and manipulation techniques. Fast beam scanning with galvanometric and polygon scanners as well as multi-beam parallel processing methods were developed. Some hot applications areas are briefly described. The efficient use of photons from ultra-short pulse lasers pushed the development of optimization methods in the ablation process. Efforts toward upscaling the process by increasing the average power of mode-locked lasers made feedback to laser developers, and burst regime became a necessity as well as high-speed beam scanning devices. Unique opportunities of ultra-short pulses are successfully exploited in machining transparent materials, with glass separation being the leading application.

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Section: A High-throughput and Precision Ablation Of Metalsmentioning

confidence: 99%

Ultra-Short Pulse Lasers for Microfabrication: A Review

Račiukaitis

2021

IEEE J. Select. Topics Quantum Electron.

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“…Industrially interesting applications are focused on highthroughput and high-precision micromachining [145,216,217] as used for, e. g., structuring, drilling, fine-cutting of metals or cutting of transparent materials (e. g., glasses). As these processes required different laser parameters usually different types of lasers were used until now.…”

Section: Discussionmentioning

confidence: 99%

High-power, high-brightness solid-state laser architectures and their characteristics

et al. 2022

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The development of high-power diode lasers enabled new solid-state laser concepts such as thin-disk, fiber, and Innoslab lasers based on trivalent ytterbium as the laser-active ion, which resulted in a tremendous increase in the efficiency and beam quality of cw lasers compared to previously used lamp-pumped rod or slab lasers and the realization of ultrafast lasers with several 100 W or even kilowatts of average power. In addition to their beneficial thermo-optical properties, these architectures offer characteristic benefits making them especially suitable to obtain dedicated laser properties. This review article comprises milestone developments, characteristic challenges, and benefits, and summarizes the state of the art of high-power solid-state lasers with the focus on ultrafast lasers.

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“…Sophisticated pump configurations using multipass designs with parabolic mirrors as well as a more complex laser design can partially circumvent this drawback. In a collaboration between Amplitude and the Institut für Strahlwerkzeuge (IFSW) of Stuttgart University, a kilowatt laser using a 125 µm thick Yb:YAG disk in a 24-pass pump cavity and an 80-pass laser amplification delivered a pulse of 1 mJ at a repetition rate of 1 MHz with a pulse duration of 560 fs [1].…”

Section: Companymentioning

confidence: 99%

Ultrafast lasers today

Mottay

2022

PhotonicsViews

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Ultrafast lasers have seen a tremendous increase in average power over the past ten years, with industrial lasers now reaching the kW level. We are at a turning point in femtosecond technology, which will enable new fields of use and new methods of production. High laser power and the associated beam engineering enable significant improvements in industrial productivity and open access to large new markets, such as aeronautics, energy, and mobility.

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High-quality high-throughput silicon laser milling using a 1 kW sub-picosecond laser

Cited by 22 publications

References 19 publications

Ultra-Short Pulse Lasers for Microfabrication: A Review

Ultra-Short Pulse Lasers for Microfabrication: A Review

High-power, high-brightness solid-state laser architectures and their characteristics

Ultrafast lasers today

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