2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS) 2022
DOI: 10.1109/eftf/ifcs54560.2022.9850764
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High Quality Factor Hybrid SAW/BAW Resonators

S. Barsoum
1
,
C. Hellion
2
,
Elisa Vermande
3
et al.

Abstract: We report hybrid SAW/BAW resonators based on arrays of AlN/Mo transducers located atop a silicon substrate. Thanks to an optimized fabrication process, these devices exhibit quality factors up to 3,900 and 1,700 respectively for the pseudo-SAW and pseudo-BAW modes, at frequencies close to 600 MHz and 2.9 GHz.

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Cited by 3 publications
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References 5 publications
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Vertical etching of Al0.7Sc0.3N for next generation of acoustic wave resonators

Terzic,
Andrianov,
Chouiki
et al. 2023
2023 Symposium on Design, Test, Integration &Amp; Packaging of MEMS/MOEMS (DTIP)
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Vertical etching of Al0.7Sc0.3N for next generation of acoustic wave resonators

Terzic,
Andrianov,
Chouiki
et al. 2023
2023 Symposium on Design, Test, Integration &Amp; Packaging of MEMS/MOEMS (DTIP)
0
0
0
0
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Impact of Transducer Aspect Ratio on the performance of AlN Hybrid SAW/BAW Resonators

Barsoum,
Schembri,
Bernard
et al. 2023
2023 IEEE International Ultrasonics Symposium (IUS)
0
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0
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Toward Band n78 Shear Bulk Acoustic Resonators Using Crystalline Y-Cut Lithium Niobate Films With Spurious Suppression

Yandrapalli
1
,
Eroglu
2
,
Mateu
3
et al. 2023
J. Microelectromech. Syst.
7
0
4
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