High-Q tellurium-oxide-coated silicon nitride microring resonators

Frankis, Henry C.; Kiani, Khadijeh Miarabbas; Mateman, Richard; Leinse, Arne; Bradley, Jonathan D. B.

doi:10.1364/ol.44.000118

Cited by 20 publications

(7 citation statements)

References 30 publications

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“…Other piezoelectric materials with stronger piezoelectricity and/or photoelasticity, such as PZT and TeO2, could further improve the efficiency of piezo-optomechanical devices, should high quality thin film with low optical loss be available. TeO 2 is widely used in bulk acousto-optic modulators (AOMs) for its excellent properties for acousto-optics, but nanofabrication of TeO 2 is challenging and needs further development [387,388].…”

Section: Piezo-optomechanicsmentioning

confidence: 99%

Integrated photonics on thin-film lithium niobate

et al. 2021

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Lithium niobate (LN), an outstanding and versatile material, has influenced our daily life for decades: from enabling high-speed optical communications that form the backbone of the Internet to realizing radio-frequency filtering used in our cell phones. This half-century-old material is currently embracing a revolution in thin-film LN integrated photonics. The success of manufacturing wafer-scale, high-quality, thin films of LN on insulator (LNOI), accompanied with breakthroughs in nanofabrication techniques, have made high-performance integrated nanophotonic components possible. With rapid development in the past few years, some of these thin-film LN devices, such as optical modulators and nonlinear wavelength converters, have already outperformed their legacy counterparts realized in bulk LN crystals. Furthermore, the nanophotonic integration enabled ultra-low-loss resonators in LN, which unlocked many novel applications such as optical frequency combs and quantum transducers. In this Review, we cover-from basic principles to the state of the art-the diverse aspects of integrated thinfilm LN photonics, including the materials, basic passive components, and various active devices based on electro-optics, all-optical nonlinearities, and acousto-optics. We also identify challenges that this platform is currently facing and point out future opportunities. The field of integrated LNOI photonics is advancing rapidly and poised to make critical impacts on a broad range of applications in communication, signal processing, and quantum information.

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Section: Piezo-optomechanicsmentioning

confidence: 99%

Integrated photonics on thin-film lithium niobate

et al. 2021

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“…For these applications, desired attributes such as exaltation of optical nonlinearity, laser threshold reduction, or enhancement of detection sensitivity are governed by the Purcell factor, which is proportional to Q/V eff , where Q is the cavity quality factor and V eff is the effective mode volume (3). To date, the optimization of Purcell factor, particularly within travelingwave cavities that are compatible with planar integrated photonic circuits, has mainly focused on increasing Q using low-loss dielectric structures (4)(5)(6). Although Q > 10 8 can be obtained within these integrated optical microcavities, their radii typically span over hundreds of micrometers.…”

Section: Introductionmentioning

confidence: 99%

Record Purcell factors in ultracompact hybrid plasmonic ring resonators

Chang

Lin

et al. 2019

Sci. Adv.

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For integrated optical devices and traveling-wave resonators, realistic use of the superior wave-matter interaction offered by plasmonics is impeded by ohmic loss, which increases rapidly with mode volume reduction. In this work, we report composite hybrid plasmonic waveguides (CHPWs) that are not only capable of guiding subwavelength optical mode with long-range propagation but also unrestricted by stringent requirements in structural, material, or modal symmetry. In these asymmetric CHPWs, the versatility afforded by coupling dissimilar plasmonic modes provides improved fabrication tolerance and more degrees of device design optimization. Experimental realization of CHPWs demonstrates propagation loss and mode area of 0.03 dB/μm and 0.002 μm2, corresponding to the smallest combination among long-range plasmonic structures reported to date. CHPW ring resonators with 2.5-μm radius were realized with record Purcell factor compared with existing plasmonic and dielectric resonators of similar radii.

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“…The results show a higher nonlinear parameter compared to that obtained in stoichiometric Si 3 N 4 waveguides. Although the values obtained are lower compared to those obtained in silicon-rich nitrides or SOI [5] our designs offer the distinct advantages of lower linear losses [22], [23] and negligible nonlinear TPA losses in both Si 3 N 4 and TeO 2 . Our expectations are that the presented designs will offer improved performance in nonlinear devices by having higher nonlinear coefficient, lower nonlinear losses, and anomalous GVD which altogether reduce the threshold power and improve the efficiency of nonlinear interactions for applications such as supercontinuum generation and broadband frequency comb generation.…”

Section: Resultsmentioning

confidence: 58%

“…Relevant to nonlinear optical devices, the TeO 2 coating can provide the additional height necessary to achieve anomalous GVD hence overcoming the need for thicker Si 3 N 4 waveguides. Further insight regarding measurements and calculations of both insertion and propagation losses can be gained by referring to our previous works on waveguide structures of similar design [22], [23]. However, in the referred papers we reported waveguides of lower height than what we are proposing here.…”

Section: Materials Properties and Waveguide Designmentioning

confidence: 60%

“…Similar to Si 3 N 4 , TeO 2 also has negligible two photon absorption. Furthermore, TeO 2 has proven to be an excellent host of rare earth ions, exhibiting higher solubility with minimal quenching [22]. We have recently demonstrated a TeO 2 on Si 3 N 4 waveguide platform with low losses and which exploits the advantages of both materials, and shown amplification in both erbium-and thulium-doped TeO 2 -coated Si 3 N 4 waveguides [22]- [25].…”

Section: Introductionmentioning

confidence: 99%

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Enhanced Nonlinearity and Engineered Anomalous Dispersion in TeO₂-coated Si₃N₄ Waveguides

2020

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We propose designs of silicon nitride (Si 3 N 4) waveguides with enhanced nonlinear parameter and engineered anomalous group velocity dispersion (GVD) by addition of tellurium oxide (TeO 2) top-coating layers of various thicknesses. The proposed waveguides have calculated nonlinear parameters of up to three times that of stoichiometric Si 3 N 4 and exhibit anomalous GVD at near infrared wavelengths. The GVD of such waveguides can be tuned between the normal and anomalous regime with different zero dispersion wavelengths by adjusting the thickness of TeO 2 coating. These designs offer promise of higher performance nonlinear devices on a standard low-loss Si 3 N 4 platform with the possibility of integration of active functionalities owing to higher solubility of rare earth dopants in tellurium oxide.

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High-Q tellurium-oxide-coated silicon nitride microring resonators

Cited by 20 publications

References 30 publications

Integrated photonics on thin-film lithium niobate

Integrated photonics on thin-film lithium niobate

Record Purcell factors in ultracompact hybrid plasmonic ring resonators

Enhanced Nonlinearity and Engineered Anomalous Dispersion in TeO₂-coated Si₃N₄ Waveguides

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High-Q tellurium-oxide-coated silicon nitride microring resonators

Cited by 20 publications

References 30 publications

Integrated photonics on thin-film lithium niobate

Integrated photonics on thin-film lithium niobate

Record Purcell factors in ultracompact hybrid plasmonic ring resonators

Enhanced Nonlinearity and Engineered Anomalous Dispersion in TeO2-coated Si3N4 Waveguides

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Enhanced Nonlinearity and Engineered Anomalous Dispersion in TeO₂-coated Si₃N₄ Waveguides