Photonic and Phononic Properties of Engineered Nanostructures XI 2021
DOI: 10.1117/12.2590752
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High-Q near-visible, air-clad, and thin-film SiN microresonator

Ali Eshaghian Dorche
1
,
Bochao Wei
2
,
Chandra Raman
3
et al.
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