High-Q-factor Al<sub>2</sub>O<sub>3</sub> micro-trench cavities integrated with silicon nitride waveguides on silicon

Su, Zhan; Frankis, Henry C.; Magden, Emir Salih; Adam, Thomas; Leake, Gerald; Coolbaugh, Douglas; Bradley, Jonathan D. B.; Watts, Michael R.

doi:10.1364/oe.26.011161

Cited by 31 publications

(24 citation statements)

References 20 publications

(27 reference statements)

Supporting

Mentioning

Contrasting

Order By: Relevance

“…However, the only reports of optical sensors using the Al 2 O 3 photonic platform are the realization of a dual-wavelength Al 2 O 3 distributed feedback laser whose evanescent field was used to detect the presence of glass microspheres of diameters ranging between 1 µm and 20 µm [37] and the usage of an Al 2 O 3 :Yb 3+ microdisk laser integrated on chip and operating in an aqueous environment to detect minute bulk refractive index variations [38]. Furthermore, high quality factor (Q) undoped Al 2 O 3 MRRs were recently demonstrated by Su et al [39], although they were not utilized for biosensing applications. The work presented here serves as a validation of using the undoped Al 2 O 3 material platform for optical biosensors, with the prospects of expanding this platform by including dopants for active sensing functionalities.…”

Section: Introductionmentioning

confidence: 99%

Al₂O₃microring resonators for the detection of a cancer biomarker in undiluted urine

Goede¹,

Dijkstra²,

Obregón³

et al. 2019

Opt. Express

View full text Add to dashboard Cite

Concentrations down to 3 nM of the rhS100A4 protein, associated with human tumor development, have been detected in undiluted urine using an integrated sensor based on microring resonators in the emerging Al 2 O 3 photonic platform. The fabricated microrings were designed for operation in the C-band (λ = 1565 nm) and exhibited a high-quality factor in air of 3.2 × 10 5. The bulk refractive index sensitivity of the devices was ~100 nm/RIU (for TM polarization) with a limit of detection of ~10 −6 RIU. A surface functionalization protocol was developed to allow for the selective binding of the monoclonal antibodies designed to capture the target biomarker to the surface of the Al 2 O 3 microrings. The detection of rhS100A4 proteins at clinically relevant concentrations in urine is a big milestone towards the use of biosensors for the screening and early diagnosis of different cancers. Biosensors based on this microring technology can lead to portable, multiplexed and easy-to-use point of care devices.

show abstract

Section: Introductionmentioning

confidence: 99%

Al₂O₃microring resonators for the detection of a cancer biomarker in undiluted urine

Goede¹,

Dijkstra²,

Obregón³

et al. 2019

Opt. Express

View full text Add to dashboard Cite

show abstract

“…This material shows great potential as an integrated photonics platform, notably thanks to its compatibility with silicon and silicon nitride and the high doping concentration of rare-earth ions that it can accomodate to form micro-lasers [37,38]. Recently, high-Q micro-ring [39,40] and photonics detection of cancer biomarkers in undiluted urine [28] have been demonstrated with Al 2 O 3 . Obviously, however, the validity of our analysis does not rely on this particular choice of material.…”

Section: Mode Splitting Due To Additional Polarizationmentioning

confidence: 99%

Portable microresonator-based label-free detector: monotonous resonance splitting with particle adsorption

2019

View full text Add to dashboard Cite

Whispering gallery mode resonators hold great promises as very sensitive detectors, with a wide range of applications, notably as biosensors. However, in order to monitor the fine variations in their resonances, a costly and bulky apparatus is required, which confines the use of these efficient tools within specialised labs. Here, we consider a micro-ring resonator that is completely covered by a Bragg grating and propose to functionalize it only over a quarter of its perimeter. As target molecules progressively bind to the active region of the resonator, some particular resonances near the edge of the band gap undergo monotonous frequency splitting. Such a splitting, within the GHz range, can be monitored by conventional electronics and, hence, does not require finely tunable lasers or spectrometers. Meanwhile, the ultrahigh sensitivity that is characteristic of whispering gallery mode resonators is maintained. This robust and sensitive self-heterodyne detection scheme may pave the way to portable whispering-gallery-mode-based detectors, and in particular to point-of-care diagnostic tools.

show abstract

“…Photolithography is currently used as a part of the standard complementary metal-oxide-semiconductor (CMOS) fabrication process in the microelectronics industry. Besides, it has been widely used in silicon photonics for optical and electronic components patterning [14][15][16][17][18][19]. Recently, it has also been applied for large-area metasurface fabrication [20][21][22][23].…”

Section: Introductionmentioning

confidence: 99%

Large-area pixelated metasurface beam deflector on a 12-inch glass wafer for random point generation

Dong

et al. 2019

Nanophotonics

Self Cite

View full text Add to dashboard Cite

Metasurface-based beam deflector, as an important optical element to bend the light propagation direction, has drawn a lot of interests in research to achieve miniaturization of devices and reduction of system complexity. Based on the 12-inch immersion lithography technology, in this work, an ultra-thin and large-area pixelated metasurface beam deflector with a footprint of 2500 × 2500 μm, formed by nanopillars with diameters from 221 to 396 nm, is demonstrated on a 12-inch glass wafer. The 21 × 21 array of deflectors is designed to bend the input light in different directions and to generate 441 random points. In addition, the layer transfer on the 12-inch glass wafer makes the device working in transmission mode at a 940-nm wavelength. The random point array generated from the experiment shows good match with the design. This pixelated metasurface beam deflector can generate random points simultaneously and has potential to make beam steering by switching each pixel of the beam deflector, which can be applied on motion detection, facial recognition, and light detection and ranging.

show abstract

High-Q-factor Al₂O₃ micro-trench cavities integrated with silicon nitride waveguides on silicon

Cited by 31 publications

References 20 publications

Al₂O₃microring resonators for the detection of a cancer biomarker in undiluted urine

Al₂O₃microring resonators for the detection of a cancer biomarker in undiluted urine

Portable microresonator-based label-free detector: monotonous resonance splitting with particle adsorption

Large-area pixelated metasurface beam deflector on a 12-inch glass wafer for random point generation

Contact Info

Product

Resources

About

High-Q-factor Al2O3 micro-trench cavities integrated with silicon nitride waveguides on silicon

Cited by 31 publications

References 20 publications

Al2O3microring resonators for the detection of a cancer biomarker in undiluted urine

Al2O3microring resonators for the detection of a cancer biomarker in undiluted urine

Portable microresonator-based label-free detector: monotonous resonance splitting with particle adsorption

Large-area pixelated metasurface beam deflector on a 12-inch glass wafer for random point generation

Contact Info

Product

Resources

About

High-Q-factor Al₂O₃ micro-trench cavities integrated with silicon nitride waveguides on silicon

Al₂O₃microring resonators for the detection of a cancer biomarker in undiluted urine

Al₂O₃microring resonators for the detection of a cancer biomarker in undiluted urine