A novel and general chemical solution route for processing high-quality transition metal and rare-earth orthorhombic manganite thin films on Pt(111)/Ti/SiO 2 /Si substrates was reported. The precursor solutions decomposition process of the manganites was studied by TG and DTA techniques, showing the formation of the phase above 650°C in LaMnO 3 and 750°C in both EuMnO 3 and DyMnO 3 thin films. X-ray diffraction and Raman spectroscopic analysis reveal the formation of a pure orthorhombic structure, with a space group Pbnm, in LaMnO 3 , EuMnO 3 and DyMnO 3 thin films annealed at temperatures above the TG phase formation temperature observed. Microstructure and grain morphology of the films were analyzed by SEM and AFM techniques, showing a progressive improvement of the films structures with the increase of the annealing temperature. The temperature dependence of the magnetic response of the LaMnO 3 , EuMnO 3 and DyMnO 3 thin films show typical transition temperatures, compared with those reported for lanthanum, europium and dysprosium manganite single crystals and ceramics.