High-Precision Ultra-Long Air Slit Fabrication Based on MEMS Technology for Imaging Spectrometers
Xiaoyu Ren,
Selina X. Yao,
Jiacheng Zhu
et al.
Abstract:The increasing demand for accurate imaging spectral information in remote sensing detection has driven the development of hyperspectral remote sensing instruments towards a larger view field and higher resolution. As the core component of the spectrometer slit, the designed length reaches tens of millimeters while the precision maintained within the μm level. Such precision requirements pose challenges to traditional machining and laser processing. In this paper, a high-precision air slit was created with a la… Show more
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