High-Precision Three-Dimensional Shape Measurement Based on Anti-Interference Parallel Object-Side Differential Axial

Study on the method of eliminating stray light and uniform light micro-illumination based on microlens array matching DMD

“…The imaging signal-to-noise ratio and the sensitivity of axial light intensity response curve at high illuminance are both higher than those at low illuminance. Improving the illuminance and uniformity of the point array light source generated by DMD in parallel is the key to ensure the high sensitivity and precision of microscopic measurement [12][13] . There are usually two methods to improve the performance of illumination uniformity and illuminance: software and hardware.…”