High-precision technique for in-situ testing of the PZT scanner based on fringe analysis

Wang, Daodang; Yang, Yongrong; Liu, Dong; Yang, Zhuo

doi:10.1016/j.optcom.2010.04.032

Cited by 9 publications

(3 citation statements)

References 24 publications

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“…At present, the traditional Michelson interferometer is used in the literature [2]. The system used a PZT driver to drive the mirror to be measured [5], generating dynamic interference fringes. The ellipse fitting algorithm [6] was[XM1] combined with theoretical derivation to measure the two-dimensional tilt angle.…”

Section: Introductionmentioning

confidence: 99%

Research on homodyne interferometric angle measurement based on ellipse fitting

Yang¹,

Zhao

Wang

et al. 2023

Earth and Space: From Infrared to Terahertz (ESIT 2022)

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In this paper, the influence of the noise and acquisition device resolution of the system is researched on Homodyne Interferometric Angle Measurement Based on Ellipse Fitting. The research method combining data simulation and experimental verification is adopted. The influence of noise and acquisition resolution on the angular resolution is obtained by comparing the experimental and simulation results. The experimental verification results are consistent with the data simulation results. The system angle measurement resolution reaches 10-5 rad, and the system noise error is between 3%- 8%.

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Section: Introductionmentioning

confidence: 99%

Research on homodyne interferometric angle measurement based on ellipse fitting

Yang¹,

Zhao

Wang

et al. 2023

Earth and Space: From Infrared to Terahertz (ESIT 2022)

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show abstract

“…However, this method is susceptible to damage to the measured surfaces during multiple applications of Vaseline and cleanings. Another disadvantage of this method is that it takes a long time to measure because only a single surface can be measured one at a time on the measured surface, and information on the optical thickness variation of the transparent parallel measured part cannot be obtained [4].…”

Section: Introductionmentioning

confidence: 99%

Error analysis and comparison of wavelength tuning phase shifting interferometry of transparent optical flats

Chang,

Gao,

2023

AOPC 2023: Optic Fiber Gyro

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Wavelength-tuning phase-shifting interferometry has advantages over conventional hardware phase-shifting for the simultaneous detection of all surfaces of the transparent parallel flats. The Fourier transform and its derivative methods can be used to characterize the signal based on the optical path difference and the phase-shifting value of the corresponding interferometric harmonic signals on each measured surface and to solve for the phase accordingly. Therefore, considering the influence of the sampling length and the choice of the window function in the Fourier transform on the measurement results, based on the established multi-surface interference model, an adequate simulation analysis is carried out, and the corresponding explanations and discussions are given subsequently. In practical measurements, the appropriate window function and sampling length should be selected according to the corresponding measurement conditions, so that reliable measurements can be guaranteed.

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“…Optical methods, such as autocollimators, interferometers and so on, are generally used for high-precision angle measurement. Recently, the method based on fringe analysis is presented to measure high-precision two-dimensional angles [3][4][5], which can be realized by obtaining good interference fringes. Compared with CCD receiving interference fringes, QPD is often used for receiving interference fringes because of its small volume and driving simply.…”

Section: Introductionmentioning

confidence: 99%

Wedge Modulation Principle Analysis of Two-Dimensional Small Angles Measurement System

Wang

Zhai

et al. 2011

AMR

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In order to implement the measurement of two-dimensional small angles, a method of modulating optical-path differences through a wedge is put forward, based on Michelson interference principle. By promoting the wedge with a voice coil motor, optical path that pass through the wedge will be changed. Then the optical-path differences on fixed points of the receiving screen will be cycle changed. Then the interference fringes will be carried out on periodical motion. Utilizing voice coil motor and right angle flexible hinge moving cycle, the relationship between the driving voltage and the displacement of wedge also has been analyzed detailedly. The experiment results show that there is a good linearity while the driving voltage is in the range 3.2v-7.5v. Modulating optical-path in this linear range, precise measurement of two-dimensional angles can be realized.

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High-precision technique for in-situ testing of the PZT scanner based on fringe analysis

Cited by 9 publications

References 24 publications

Research on homodyne interferometric angle measurement based on ellipse fitting

Research on homodyne interferometric angle measurement based on ellipse fitting

Error analysis and comparison of wavelength tuning phase shifting interferometry of transparent optical flats

Wedge Modulation Principle Analysis of Two-Dimensional Small Angles Measurement System

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