“…The method of self-collimation has maintained enduring popularity and continues to be utilized, with the development of numerous diverse variations over time [ 171 , 173 , 178 , 209 , 210 , 211 , 212 , 213 , 214 , 215 , 216 , 217 , 218 , 219 , 220 , 221 , 222 , 223 , 224 , 225 , 226 , 227 ]. The detection units are CCDs (Charge Coupled Devices) [ 228 , 229 ], QPDs (quadrant photodiodes) [ 230 , 231 ], and PSDs (position-sensitive detectors) [ 64 , 232 , 233 ]. In multi-degree-of-freedom measurement, an autocollimator is often used for integrated design, with the help of PSDs [ 234 , 235 , 236 ] and QPDs [ 179 , 237 ].…”