2017
DOI: 10.1088/1361-6501/aa58b8
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High-precision self-adaptive phase-calibration method for wavelength-tuning interferometry

Abstract: We introduce a high-precision self-adaptive phase-calibration method for performing wavelength-tuning interferometry. Our method is insensitive to the nonlinearity of the phase shifter, even under random control. Intensity errors derived from laser voltage changes can be restrained by adopting this approach. Furthermore, this method can effectively overcome the influences from the background and modulation intensities in the interferogram, regardless of the phase structure. Numerical simulations and experiment… Show more

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Cited by 4 publications
(2 citation statements)
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References 14 publications
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“…Therefore, there inevitably exists some systematic errors in the phase difference between the nodes. To improve the phase difference measurement accuracy, a calibration is made based on the phase frequency characteristics of the sensors [25,26].…”
Section: The Principle Of High Precision Time-difference Informatimentioning
confidence: 99%
“…Therefore, there inevitably exists some systematic errors in the phase difference between the nodes. To improve the phase difference measurement accuracy, a calibration is made based on the phase frequency characteristics of the sensors [25,26].…”
Section: The Principle Of High Precision Time-difference Informatimentioning
confidence: 99%
“…However, the surface accuracy of optical components is generally determined as the measured difference between the component surface and a flat reference mirror employed in the interferometer system. erefore, the accuracy of interferometry measurements is limited by the surface accuracy of the reference mirror, and the impact of reference mirror surface errors on the measurement results is not negligible when the surface accuracy of the reference mirror resides at a comparable level to that of the optical component [2,3]. Accordingly, the influence of gravity-induced deformation of the reference mirror cannot be ignored in subnanometer scale measurements.…”
Section: Introductionmentioning
confidence: 99%