High Precision Optical Sensors for Real-Time On-line Measurement of Straightness and Angular Errors for Smart Manufacturing

Lee, Hau-Wei; Liu, Chien-Hung

doi:10.1080/23080477.2016.1207407

Cited by 8 publications

(7 citation statements)

References 20 publications

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“…There are three types of straightness measurement principles: mechanical-datumbased (Type 1) [15,16], collimated-light-based (Type 2) [17,18], and interferometry-based (Type 3) [19][20][21].…”

Section: Introductionmentioning

confidence: 99%

A Straightness Error Compensation System for Topography Measurement Based on Thin Film Interferometry

Fang

et al. 2021

Photonics

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Straightness error compensation is a critical process for high-accuracy topography measurement. In this paper, a straightness measurement system was presented based on the principle of fringe interferometry. This system consisted of a moving optical flat and a stationary prism placed close to each other. With a properly aligned incident light beam, the air wedge between the optical flat and the prism would generate the interferogram, which was captured by a digital camera. When the optical flat was moving with the motion stage, the variation in air wedge thickness due to the imperfect straightness of the guideway would lead to a phase shift of the interferogram. The phase shift could be calculated, and the air wedge thickness could be measured accordingly using the image processing algorithm developed in-house. This air wedge thickness was directly correlated with the straightness of the motion stage. A commercial confocal sensor was employed as the reference system. Experimental results showed that the repeatability of the proposed film interferometer represented by σ was within 25 nm. The measurement deviation between the film interferometer and the reference confocal sensor was within ±0.1 µm. Compared with other interferometric straightness measurement technologies, the presented methodology was featured by a simplified design and good environment robustness. The presented system could potentially be able to measure straightness in both linear and angular values, and the main focus was to analyze its linear value measurement capability.

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Section: Introductionmentioning

confidence: 99%

A Straightness Error Compensation System for Topography Measurement Based on Thin Film Interferometry

Fang

et al. 2021

Photonics

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“…Therefore, it is a time-consuming work to completely measure all geometric motion errors of the linear precision stage using the laser interferometer [ 7 , 11 , 12 ]. In recent years, some measurement systems for simultaneously measuring multi-DOF geometric motion errors of a long linear stage of a machine tool have been developed in the literature [ 13 , 14 , 15 , 16 , 17 , 18 , 19 , 20 , 21 , 22 , 23 , 24 , 25 , 26 , 27 , 28 , 29 , 30 , 31 ]. For example, for contact measurement, Mura proposed a novel measurement device, consisting of six displacement sensors mounted as a parallel mechanism based on the Stewart theory.…”

Section: Introductionmentioning

confidence: 99%

Design of a Measurement System for Simultaneously Measuring Six-Degree-Of-Freedom Geometric Errors of a Long Linear Stage

Liu

Chen

et al. 2018

Sensors

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This study designs and characterizes a novel precise measurement system for simultaneously measuring six-degree-of-freedom geometric motion errors of a long linear stage of a machine tool. The proposed measurement system is based on a method combined with the geometrical optics method and laser interferometer method. In contrast to conventional laser interferometers using only the interferometer method, the proposed measurement system can simultaneously measure six-degree-of-freedom geometric motion errors of a long linear stage with lower cost and faster operational time. The proposed measurement system is characterized numerically using commercial software ZEMAX and mathematical modeling established by using a skew-ray tracing method, a homogeneous transformation matrix, and a first-order Taylor series expansion. The proposed measurement system is then verified experimentally using a laboratory-built prototype. The experimental results show that, compared to conventional laser interferometers, the proposed measurement system better achieves the ability to simultaneously measure six-degree-of-freedom geometric errors of a long linear stage (a traveling range of 250 mm).

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“…Yan et al [157], Lee and Liu [158], and Lee et al [159] all tackled the optical sensor issue by using a "cat's eye" reflector based optical sensor. Setups using two reflective-type optical sensors, and a 3-D optical sensor system were used.…”

Section: Smart Sensorsmentioning

confidence: 99%

A Review of Artificial Intelligence Algorithms Used for Smart Machine Tools

2018

Self Cite

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This paper offers a review of the artificial intelligence (AI) algorithms and applications presently being used for smart machine tools. These AI methods can be classified as learning algorithms (deep, meta-, unsupervised, supervised, and reinforcement learning) for diagnosis and detection of faults in mechanical components and AI technique applications in smart machine tools including intelligent manufacturing, cyber-physical systems, mechanical components prognosis, and smart sensors. A diagram of the architecture of AI schemes used for smart machine tools has been included. The respective strengths and weaknesses of the methods, as well as the challenges and future trends in AI schemes, are discussed. In the future, we will propose several AI approaches to tackle mechanical components as well as addressing different AI algorithms to deal with smart machine tools and the acquisition of accurate results.Keywords: artificial intelligence; smart machine tools; learning algorithms; intelligent manufacturing; fault diagnosis and prognosis Brief IntroductionWe believe that a new epoch of the "Industrial Internet of Things (IIoT) plus artificial intelligence (AI)", characterized by big machinery data, data-driven techniques, ubiquitous networks, mass innovation, automatic intelligence, cross-border integration, and shared services, has arrived [1-3]. The fast development and combination of new AI and energy technologies, for materials, bioscience, the Internet, and new-generation information exchange, is a fundamental part of this new epoch. This will, in turn, permit game-changing transformation of models, ecosystems, and means in the light of their application to national security, well-being, and the economy. The main objective is a review and summary of recent achievement in data-based techniques, especially for complicated industrial applications, offering reference for further study from both an academic and practical point of view. Yin et al.[1] describes a brief evolutionary overview of data-based techniques over the last two decades. Recent development of modern industrial applications is presented mainly from the perspectives of monitoring and control. Their methodology, based on process measurements and model-data integrated techniques, will be introduced in the next study. Jeschke et al. [2] developed the core system science needed to enable the development of complex IIoT/manufacturing cyber-physical systems (CPS). Moreover, readers can learn the current state of IIoT and the concept of cybermanufacturing from this book. In 2014, Lund et al. [3] described the central issues contributing to, and characterizing, the worldwide and regional growth of the IoT. Besides, researchers can utilize the trend analysis of IoT their region markets in the future.There are many AI algorithms for machine health monitoring and other machine tool applications: The second-order recurrent neural networks (RNN) method for the learning and extraction of finite

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High Precision Optical Sensors for Real-Time On-line Measurement of Straightness and Angular Errors for Smart Manufacturing

Cited by 8 publications

References 20 publications

A Straightness Error Compensation System for Topography Measurement Based on Thin Film Interferometry

A Straightness Error Compensation System for Topography Measurement Based on Thin Film Interferometry

Design of a Measurement System for Simultaneously Measuring Six-Degree-Of-Freedom Geometric Errors of a Long Linear Stage

A Review of Artificial Intelligence Algorithms Used for Smart Machine Tools

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