High-precision optical fiber Fabry–Perot composite sensor for pressure and temperature

Chen, Xuzhi; Tong, Xiaofeng; Zhang, Cui; Deng, Chengwei; Mao, Yan; Chen, Shimeng

doi:10.1016/j.optcom.2021.127580

Cited by 13 publications

(3 citation statements)

References 20 publications

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“…Optical sensors have extraordinary potential in a wide range of clinical measurements and detection. 62,63 However, the adjustable optical performance and reconfigurable sensor structure of wearable optical sensors still have huge challenges. 61,64 Sometimes, through the optical interface of the sensor, the skin provides a path from the hidden blood vessel structure and organs.…”

Section: Sensors and Diagnosticsmentioning

confidence: 99%

Recent advances in skin-like wearable sensors: sensor design, health monitoring, and intelligent auxiliary

Huang

Cheng³

et al. 2022

Sens. Diagn.

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Section: Sensors and Diagnosticsmentioning

confidence: 99%

Recent advances in skin-like wearable sensors: sensor design, health monitoring, and intelligent auxiliary

Huang

Cheng³

et al. 2022

Sens. Diagn.

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“…However, capacitive pressure sensors can be affected by parasitic capacitance creating difficulties ensuring measurement accuracy in complex environments. The optical fiber pressure sensor is small in size, has anti-electromagnetic interference and high-temperature resistance [ 15 , 16 ] to overcome the above problems. For example, Fei Feng reported an optical fiber Fabry–Perot pressure sensor [ 17 ] as having a maximum linearity error of 1% in the temperature range of 20–400 °C; Mohammad Istiaque Reja developed a pure silica micro-structured optical fiber pressure sensor which can tolerate temperatures up to 800 °C [ 18 ].…”

Section: Introductionmentioning

confidence: 99%

Femtosecond Laser Processing Assisted SiC High-Temperature Pressure Sensor Fabrication and Performance Test

Zhao

Wang

et al. 2023

Micromachines

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Due to material plastic deformation and current leakage at high temperatures, SOI (silicon-on-insulator) and SOS (silicon-on-sapphire) pressure sensors have difficulty working over 500 °C. Silicon carbide (SiC) is a promising sensor material to solve this problem because of its stable mechanical and electrical properties at high temperatures. However, SiC is difficult to process which hinders its application as a high-temperature pressure sensor. This study proposes a piezoresistive SiC pressure sensor fabrication method to overcome the difficulties in SiC processing, especially deep etching. The sensor was processed by a combination of ICP (inductive coupled plasma) dry etching, high-temperature rapid annealing and femtosecond laser deep etching. Static and dynamic calibration tests show that the accuracy error of the fabricated sensor can reach 0.33%FS, and the dynamic signal response time is 1.2 μs. High and low temperature test results show that the developed sensor is able to work at temperatures from −50 °C to 600 °C, which demonstrates the feasibility of the proposed sensor fabrication method.

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“…In order to reduce the influence of temperature on the MEMS pressure sensor, some scholars have improved the sensor structure to enhance temperature stability. Cheng Pang and Xuzhi Chen et al [32,33] designed a MEMS pressure sensor with a double F-P cavity structure, which can measure temperature and pressure simultaneously and calibrate the pressure with temperature. Wenhua Wang et al [21] reduced the influence of thermal expansion coefficient, epoxy resin decomposition, and working point drift by improving the welding process and sensor structure, thus reducing the temperature sensitivity to 0.011 nm/ • C. Vellaluru neeharika et al [23] placed two waveguide gratings with the same temperature coefficients on the MEMS pressure sensor, eliminating the influence of temperature.…”

Section: Introductionmentioning

confidence: 99%

Research on Temperature Compensation of Optical Fiber MEMS Pressure Sensor Based on Conversion Method

Yao

Shang

et al. 2022

Photonics

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The characteristics of optical fiber MEMS pressure sensors are easily affected by temperature, so effective temperature compensation can improve the accuracy of the sensor. In this paper, the temperature characteristics of optical fiber MEMS pressure sensors are studied, and a temperature compensation method by converting the wavelength is proposed. The influence of target temperature and data point selection on the compensation effect is studied, and the effectiveness of the method is verified by the temperature compensation of sensors before and after aging. When the converted target temperature is 25 °C, the pressure measurement accuracy of the sensor is improved from 1.98% F.S. to 0.38% F.S. within the range of 5–45 and 0–4 MPa. The method proposed in this paper can not only improve the accuracy but also make the regular calibration more operable.

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High-precision optical fiber Fabry–Perot composite sensor for pressure and temperature

Cited by 13 publications

References 20 publications

Recent advances in skin-like wearable sensors: sensor design, health monitoring, and intelligent auxiliary

Recent advances in skin-like wearable sensors: sensor design, health monitoring, and intelligent auxiliary

Femtosecond Laser Processing Assisted SiC High-Temperature Pressure Sensor Fabrication and Performance Test

Research on Temperature Compensation of Optical Fiber MEMS Pressure Sensor Based on Conversion Method

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