High-precision multi-sub-envelope zero-order pole-bias-compensation white-light interferometric topography measurement method

Abstract

The mZPBC white-light topography measurement method is proposed. In contrast with other methods, this algorithm has a real physical model and directly solves the accurate topography information in spatial domain. We obtain the mathematical expression of this method in theory, verify the noise suppression effect by simulation, and perform the actual measurement experiment to verify the accuracy and efficiency.