High Precision Hemispherical Resonator Gyroscopes With Oven Control Systems

Zhao, Weiduo; Rong, Yijie; Li, Chong; Wang, Yuchen; Cai, Xiong; Yu, Xiangyu

doi:10.1109/jsen.2021.3050206

Cited by 13 publications

(4 citation statements)

References 21 publications

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“…These two symmetric and perpendicular bending deformations of the hemispherical shell are called the elliptical mode [ 53 ]. They are also referred to as a standing wave pattern since the position of the maximum displacements (lobes or antinodes) and minimum/null displacement (nodes) are stable with respect to the shell [ 51 , 57 ].…”

Section: Theory and Performance Of Hrgmentioning

confidence: 99%

“…However, miniaturization of such 3D structures, while retaining symmetry and material properties, is challenging. The quality of the resonator can be impaired by material defects, residual stress, geometric parameter errors and other fabrication defects [ 53 ]. Building a gyroscope with a high-performance matrix at low cost is the most challenging task [ 50 ].…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Recent Advances in MEMS-Based 3D Hemispherical Resonator Gyroscope (HRG)—A Sensor of Choice

Ranji

Damodaran

et al. 2022

Micromachines

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Macro-scale, hemispherical-shaped resonating gyroscopes are used in high-precision motion and navigation applications. In these gyroscopes, a 3D wine-glass, hemispherical-shaped resonating structure is used as the main sensing element. Motivated by the success of macroscale hemispherical shape gyroscopes, many microscale hemispherical-shaped resonators have been produced due to the rapid advancement in semiconductor-based microfabrication technologies. The dynamic performance of hemispherical resonators depends on the degree of symmetry, uniformity of thickness, and surface smoothness, which, in turn, depend on the type of materials and fabrication methods. The main aim of this review paper is to summarize the materials, characterization and fabrication methods reported in the literature for the fabrication of microscale hemispherical resonator gyroscopes (µHRGs). The theory behind the development of HRGs is described and advancements in the fabrication of microscale HRGs through various semiconductor-based fabrication techniques are outlined. The integration of electrodes with the hemispherical structure for electrical transduction using other materials and fabrication methods is also presented. A comparison of different materials and methods of fabrication from the point of view of device characteristics and dynamic performance is discussed. This review can help researchers in their future research and engineers to select the materials and methods for µHRG development.

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Section: Theory and Performance Of Hrgmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Recent Advances in MEMS-Based 3D Hemispherical Resonator Gyroscope (HRG)—A Sensor of Choice

Ranji

Damodaran

et al. 2022

Micromachines

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“…2, February 2023: 715-724 716 resonator as it rotates around an axis perpendicular to the plane of the ring. There are known solutions to general problems of the theory of HRG for an elastic inextensible ring, for an elastic tensile ring [6]- [8] the equations of oscillations of an elastic spherically symmetric body are known with an analysis of the precession of standing waves in it and with an analysis of the precession of standing waves in a hemispherical shell [9]- [11].…”

Section: Introductionmentioning

confidence: 99%

Method for measuring voltages in channels of a hemispherical resonator gyroscope with an arbitrary orientation axes

Parkhomey

Boiko²,

Zeniv³

et al. 2023

IJEECS

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<span>The article deals with issues related to solid wave gyroscopes, which are used as a sensor in inertial navigation systems. The article considers a variant of solving problem, when oscillations of the resonator are excited in directions that coincide with their own axes, oriented a priori is unknown. The main contribution this article is the method is proposed for measuring signal amplitudes in virtual main and quadrature channels, the orientation of which does not coincide with the orientation of the signal pickup electrodes. This is achieved by modeling algorithms for measuring the slope of the resonator's own axes and signal amplitudes in virtual channels are evaluation. In order to verify the adequacy of the proposed models simplified calculation formulas for programming microcontrollers are presented. An estimate of the error due to the use of simplified formulas is made. It is assumed that the use of this method will reduce the requirements for the quality of balancing the resonators of gyroscopes. The findings will be useful for mass production of navigation systems with gyroscopes, which have a small drift and are capable of experiencing large shock linear accelerations, for example, in underground inclined drilling, and in meteorological rockets.</span>

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“…1,2 The hemispherical resonator, for example, is a key component of hemispherical resonator gyroscope (HRG), which has been broadly used in the inertial navigation of aerospace, automotive industry, etc., in recent years. [3][4][5] Ultra-low-frequency splitting is required for the high-precision HRG, but it great depends on the form accuracy of the resonator. For components like the hemispherical resonator, the characteristics of two-sided curved surfaces and thin thickness poses great difficulties on the precision form characterization process.…”

Section: Introductionmentioning

confidence: 99%

Bilateral form characterization of curved transparent components using chromatic confocal sensor

Wu,

Zhao,

Jiang

et al. 2023

Opt. Eng.

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To accurately characterize the geometric form of key components in industrial products, many profile measuring instruments have been developed to date. However, there are some special components, such as the hemispherical resonators featuring thin curved transparent surfaces, which are difficult to be measured using general instruments. The chromatic confocal technology was introduced in this paper to conduct the bilateral form characterization of this type of surfaces. Based on the assumption of tilted plate approximation, a modified ray tracing model was presented to correct the errors produced by the curved surfaces. The experiment of measurement on tilted, fused silica plates was conducted to demonstrate the effectiveness of the proposed model. Results show that the developed model improves the measurement accuracy of plates with large tilt angle. A three-axis motion stage was built with self-developed chromatic confocal sensor to obtain the bilateral profiles of the resonator. By fitting the spheres with the scanning profiles, the form error between the measurement points and the fitted spheres can be calculated. Partial form errors along the circumferential and axial directions of the resonator are evaluated, and an intuitive assessment of its thickness variation along the circumferential direction was made.

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High Precision Hemispherical Resonator Gyroscopes With Oven Control Systems

Cited by 13 publications

References 21 publications

Recent Advances in MEMS-Based 3D Hemispherical Resonator Gyroscope (HRG)—A Sensor of Choice

Recent Advances in MEMS-Based 3D Hemispherical Resonator Gyroscope (HRG)—A Sensor of Choice

Method for measuring voltages in channels of a hemispherical resonator gyroscope with an arbitrary orientation axes

Bilateral form characterization of curved transparent components using chromatic confocal sensor

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