High Precision Flexural Mechanisms for Scanning Applications: A Comprehensive Review

Abstract

Flexure mechanisms are a designer's delight; several mechanisms, including as piezo-based stages, spring-loaded systems, and ball screw mechanisms, have been developed to meet the needs of precision scanning applications. The importance of precision positioning stems from its critical role in accomplishing improved production and precise measurements. While rigid body mechanisms like spring-loaded and ball screw systems provide a wide range of motion, they run at slower speeds, have reduced positioning precision, and are prone to friction and backlash problems. On the other hand, piezo-based Nano positioning stages have a high operational speed and precision but a limited scanning range. In response to these issues, researchers are increasingly focusing on flexural processes. These mechanisms have fast speeds, large scanning ranges, and excellent positioning precision. Flexural mechanisms offer frictionless and backlash-free motion, allowing for high levels of repeatability and precision control. This article provides a detailed analysis of the development of flexural mechanisms, including planar and hinge varieties, by researchers throughout the world. The present level of research into creating flexural mechanisms for high-precision applications is also discussed. The study finishes by outlining the process of designing and implementing flexural mechanisms for a variety of applications.