High Precision Flexural Mechanisms for Scanning Applications: A Comprehensive Review
Prasanna Raut,
A. S. Rao,
Pratik Waghmare
et al.
Abstract:Flexure mechanisms are a designer's delight; several mechanisms, including as piezo-based stages, spring-loaded systems, and ball screw mechanisms, have been developed to meet the needs of precision scanning applications. The importance of precision positioning stems from its critical role in accomplishing improved production and precise measurements. While rigid body mechanisms like spring-loaded and ball screw systems provide a wide range of motion, they run at slower speeds, have reduced positioning precisi… Show more
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