High-precision 2D grating displacement measurement system based on double-spatial heterodyne optical path interleaving

Yin, Yuan‐Qi; Liu, Zhaowu; Jiang, Shan; Wang, Wei; Yu, Hongzhu; Galantu, Jiri; Qun, HAO; Wen-Hao, LI

doi:10.1016/j.optlaseng.2022.107167

Cited by 14 publications

(3 citation statements)

References 18 publications

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“…The biquadrature lock-in amplification algorithm processes the acquired signals into quadrature signals with a Doppler shift range of ±16 MHz. In theory, it is necessary to judge the direction of the frequency range of DC-16 MHz; however, the stationary motion of the table does not necessarily mean absolute stillness, and slow drift will cause some frequency changes [28][29][30]. According to engineering requirements, if the Doppler frequency is below 300 Hz, which corresponds to a kinematic table velocity of approximately 0.22 mm/s, the table is considered stationary.…”

Section: Design Of a Real-time Direction Judgment Modulementioning

confidence: 99%

Real-Time Direction Judgment System for Dual-Frequency Laser Interferometer

Zeng,

Chen,

et al. 2024

Sensors

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Current real-time direction judgment systems are inaccurate and insensitive, as well as limited by the sampling rate of analog-to-digital converters. To address this problem, we propose a dynamic real-time direction judgment system based on an integral dual-frequency laser interferometer and field-programmable gate array technology. The optoelectronic signals resulting from the introduction of a phase subdivision method based on the amplitude resolution of the laser interferometer when measuring displacement are analyzed. The proposed system integrates the optoelectronic signals to increase the accuracy of its direction judgments and ensures these direction judgments are made in real time by dynamically controlling the integration time. Several experiments were conducted to verify the performance of the proposed system. The results show that, compared with current real-time direction judgment systems, the proposed system makes accurate judgements during low-speed motions and can update directions within 0.125 cycles of the phase difference change at different speeds. Moreover, a sweep frequency experiment confirmed the system’s ability to effectively judge dynamic directions. The proposed system is capable of accurate and real-time directional judgment during low-speed movements of a table in motion.

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Section: Design Of a Real-time Direction Judgment Modulementioning

confidence: 99%

Real-Time Direction Judgment System for Dual-Frequency Laser Interferometer

Zeng,

Chen,

et al. 2024

Sensors

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“…Grating spacing calibration is the pivotal technology for meeting the high-precision positioning demands of nanoscale measurement technology, and has been widely used in micro/nanofabrication, precision manufacturing, microelectronics, and other fields rooted in nanotechnology research [1]. Common methods for grating spacing calibration include long trace profiler (LTP) [2][3][4], scanning reference grating (SRG) [5][6][7], Atomic Force Microscopy (AFM), and grating diffraction [8][9][10].…”

Section: Introductionmentioning

confidence: 99%

Research on Dual-Grating Spacing Calibration Method Based on Multiple Improved Complete Ensemble Empirical Mode Decomposition with Adaptive Noise Combined with Hilbert Transform

Zhu,

Sun,

Guan

et al. 2024

Photonics

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The paper proposes a method for the calibration of spacing in dual-grating based on Multiple Improved Complete Ensemble Empirical Mode Decomposition with Adaptive Noise (ICEEMDAN) combined with Hilbert Transform (HT), referred to as Multiple ICEEMDAN-HT. This method addresses the potential impact of nonlinear factors on phase extraction accuracy, consequently on ranging precision in the homodyne interference of the dual-grating. Building upon the ICEEMDAN algorithm, the signal undergoes iterative decomposition and reconstruction using the sample entropy criterion. The intrinsic mode functions (IMFs) obtained from multiple iterations are then reconstructed to obtain the complete signal. Through a simulation and comparison with other signal decomposition methods, the repeatability and completeness of signal reconstruction by Multiple ICEEMDAN are verified. Finally, an actual dual-grating ranging system is utilized to calibrate the spacing of the planar grating. Experimental results demonstrate that the calibration relative error of the Multiple ICEEMDAN-HT phase unwrapping method can be reduced to as low as 0.07%, effectively enhancing the signal robustness and spacing calibration precision.

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“…A grating interferometer plays a critical role in the field of high-precision displacement measurement, which is characterized by good robustness, high accuracy and cost performance [1][2][3][4].…”

Section: Introductionmentioning

confidence: 99%