2013
DOI: 10.1063/1.4826943
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High power terahertz quantum cascade lasers with symmetric wafer bonded active regions

Abstract: We increased the active region/waveguide thickness of terahertz quantum cascade lasers with semi-insulating surface plasmon waveguides by stacking two symmetric active regions on top of each other, via a direct wafer bonding technique. In this way, we enhance the generated optical power in the cavity and the mode confinement. We achieved 470 mW peak output power in pulsed mode from a single facet at a heat sink temperature of 5 K and a maximum operation temperature of 122 K. Furthermore, the devices show a bro… Show more

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Cited by 80 publications
(47 citation statements)
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“…Since the first demonstration in 2002, 3 THz QCLs have witnessed a rapid development. Till date, the frequency ranges from 1.2 to 5.0 THz 4,5 and the highest output power in pulsed wave (PW) mode achieves more than 1 W. 6,7 However, the output power in continuous wave (CW) mode is still limited to 138 mW since 2006. 8 This is an impediment toward many important applications in spectroscopy, imaging, remote sensing, etc.…”
mentioning
confidence: 99%
“…Since the first demonstration in 2002, 3 THz QCLs have witnessed a rapid development. Till date, the frequency ranges from 1.2 to 5.0 THz 4,5 and the highest output power in pulsed wave (PW) mode achieves more than 1 W. 6,7 However, the output power in continuous wave (CW) mode is still limited to 138 mW since 2006. 8 This is an impediment toward many important applications in spectroscopy, imaging, remote sensing, etc.…”
mentioning
confidence: 99%
“…In terms of size, output power, and efficiency, THz quantum cascade lasers (QCLs) 2,3 are the devices of choice to generate such radiation. These electrically pumped semiconductor lasers are capable of delivering watt-level output power 4,5 and reach maximum operating temperatures up to 200 K. 6 Dependent on the specific application, it is essential to use single mode lasers with high spectral purity, e.g. for local oscillators in heterodyne receivers, 7 whereas for other applications, THz QCLs with broadband gain media are highly desirable.…”
mentioning
confidence: 99%
“…As a consequence, an important activity in this field is dedicated to developing sources such as photoconductive devices [8,9], quantum cascade lasers [10] or exploring new schemes for THz generation like intracavity difference-frequency generation in mid-infrared quantum cascade lasers [11]. In parallel, important effort is dedicated to the study of new physical properties within novel materials [12,13].…”
mentioning
confidence: 99%