2020
DOI: 10.1016/j.ceramint.2019.12.042
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High-power impulse magnetron sputtering deposition of high crystallinity vanadium dioxide for thermochromic smart windows applications

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Cited by 26 publications
(9 citation statements)
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“…Consequently, the elaboration of VO2 in thin films is not compatible with temperature-sensitive substrates. High power impulse magnetron sputtering (HiPIMS) is a novel sputtering method, applied recently to the deposition of VO2 films [13,14,15]. It is characterized by a high target current and thus a production of highly energetic sputtered ions [16].…”
Section: Introductionmentioning
confidence: 99%
“…Consequently, the elaboration of VO2 in thin films is not compatible with temperature-sensitive substrates. High power impulse magnetron sputtering (HiPIMS) is a novel sputtering method, applied recently to the deposition of VO2 films [13,14,15]. It is characterized by a high target current and thus a production of highly energetic sputtered ions [16].…”
Section: Introductionmentioning
confidence: 99%
“…At the temperature of 30 °C, Raman peaks of 194, 224, 310, 389, 498, 615 cm −1 could all be attributed to VO 2 (M), which is consistent with other literature. [34] However, there are no peaks in Raman spectra of the VO 2 film at 90 °C, except for the substrate peak. It manifests a gradual transformation of VO 2 (M) to VO 2 (R) with the gradual disappearance of all characteristic peaks when temperature was increased from 30 to 90 °C during heating process.…”
Section: Resultsmentioning
confidence: 97%
“…The luminous (visible) and solar transmission characteristics of the as-prepared VO 2 films deposited on sapphire substrates are also analyzed. The luminous transmittance ( ), solar transmittance ( ), the luminous modulation and solar modulation ( ) efficiencies are commonly considered properties for smart window applications [ 44 , 45 , 46 , 47 , 48 , 49 , 50 ]. measures the amount of visible light passing through a semi-transparent material.…”
Section: Resultsmentioning
confidence: 99%