High-power and high-brightness solid state laser systems for precise and fast micromachining

Binder, Alexander; Jaber, Houssam; Ashkenasi, David; Riesbeck, Thomas; Eichler, H. J.

doi:10.1117/12.529418

Cited by 3 publications

(2 citation statements)

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“…The MOPA system presently emits up to 45 W@M² = 2.2 at 532 nm. 5 The laser pulses (duration between 25 and 230 ns) are generated in a burst mode of 2-40 individual laser pulses at a rate of 100Hz, yielding a quasi repetition rate of 0.2 to 4kHz. The laser pulses were typically focused onto the front surface of the glass samples using lenses with focusing lengths between 10 and 115 mm.…”

Section: Methodsmentioning

confidence: 99%

DPSSL for direct dicing and drilling of dielectrics

Ashkenasi

Schwagmeier

2007

SPIE Proceedings

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New strategies in laser micro processing of glasses and other optically transparent materials are being developed with increasing interest and intensity using diode pumped solid state laser (DPSSL) systems generating short or ultra-short pulses in the optical spectra at good beam quality. Utilizing non-linear absorption channels, it can be demonstrated that ns green (532 nm) laser light can scribe, dice, full body cut and drill (flat) borofloat and borosilicate glasses at good quality. Outside of the correct choice in laser parameters, an intelligent laser beam management plays an important role in successful micro processing of glass. This application characterizes a very interesting alternative where standard methods demonstrate severe limitations such as diamond dicing, CO2 laser treatment or water jet cutting, especially for certain type of optical materials and/or geometric conditions. Application near processing examples using different DPSSL systems generating ns pulsed light at 532 nm in TEM 00 at average powers up to 10 W are presented and discussed in respect to potential applications in display technology, micro electronics and optics.

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Section: Methodsmentioning

confidence: 99%

DPSSL for direct dicing and drilling of dielectrics

Ashkenasi

Schwagmeier

2007

SPIE Proceedings

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“…High-peak power ͑Ͼ10 MW͒, high-average power ͑Ͼ10 W͒ laser operation with Nd:YAG is typically achieved by power oscillator [1,2,3,4,5] operation or by MOPA (master-oscillator power amplifier) [6,7,8,9,10,11] operation. In the case of q-switched power oscillators, pulse widths typically range from 7-100 ns.…”

Section: Introductionmentioning

confidence: 99%