High power and good beam quality of two-dimensional VCSEL array with integrated GaAs microlens array

Abstract

High power and good beam quality of two-dimensional bottom-emitting vertical-cavity surface-emitting laser array with GaAs microlens on the substrate is achieved. Uniform and matched convex microlens is directly fabricated by one-step diffusion-limited wet-etching techniques on the emitting windows. The maximum output power is above 1 W at continuous-wave operation at room temperature, and the far-field beam divergence is below 6.6° at a current of 4 A. These properties between microlens-integrated and conventional device at different operating current are demonstrated.

High power density vertical-cavity surface-emitting lasers with ion implanted isolated current aperture

“…The maximum output power of over 380 mW has been achieved at 15 °C. Note that the estimated power density is 4.9 kW/cm 2 , higher than that of the previous reports on the high power single VCSELs [1,2,7,[13][14][15]. And more the device exhibits the superior output characteristic than any other ion implanted VCSELs [11,12].…”

“…An output power of over 380 mW from the 100-µm-diameter aperture has been achieved under CW operation. The power density of 4.9 kW/cm2 is higher than that of any other oxide-confinement VCSELs [1,2,7,[13][14][15]. These results must be an important step to develop high power 2D-VCSEL arrays.…”

Collective Micro-Optics Technologies for VCSEL Photonic Integration

“…• for each individual pixel were demonstrated with this technique [28]. Design and fabrication of hybrid microlens-both refractive and diffractive-to compensate aberrations and achieve athermalization was also proven, with the achievement of a very low beam divergence (0.3…”

Design and comparison of GaAs, GaAsP and InGaAlAs quantum-well active regions for 808-nm VCSELs

“…Vertical-cavity surface-emitting lasers (VCSELs) have been proved as strong competitors to edge-emitting semiconductor lasers because of its significant advantages such as circular output beam, low threshold current, low cost and easy fabrication in two-dimensional arrays to scale up the power [1][2][3]. These advantages, together with its high-speed modulation, have made it widespread application in short-distance parallel fiber-optic interconnects and highpower laser source [4][5][6]. VCSELs emitting at many different wavelengths have been extensively studied and some 980, 850, and 780 nm devices have been commercialized into various lightwave systems [7][8][9].…”