2020
DOI: 10.1109/tnano.2020.3004222
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High Performance Transparent a-IGZO Thin Film Transistors With ALD-HfO2 Gate Insulator on Colorless Polyimide Substrate

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Cited by 17 publications
(6 citation statements)
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“…When the system is static in thermal equilibrium, a unified Fermi level is formed, and there is no net current flowing through the system. Meanwhile, due to the difference in the work function of Pt (Ф Pt ≈5.65 eV) [ 22 ] and IGZO (Ф IGZO ≈4.50 eV), [ 20 ] the semiconductor surface energy band will be bent, resulting in a space charge region and a built‐in electric field similar to a PN junction, as shown in Figure a. The nonlinear I – V curve confirms that there exists a built‐in electric field in the junction, as shown in Figure 2h.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…When the system is static in thermal equilibrium, a unified Fermi level is formed, and there is no net current flowing through the system. Meanwhile, due to the difference in the work function of Pt (Ф Pt ≈5.65 eV) [ 22 ] and IGZO (Ф IGZO ≈4.50 eV), [ 20 ] the semiconductor surface energy band will be bent, resulting in a space charge region and a built‐in electric field similar to a PN junction, as shown in Figure a. The nonlinear I – V curve confirms that there exists a built‐in electric field in the junction, as shown in Figure 2h.…”
Section: Resultsmentioning
confidence: 99%
“…Herein, we propose a flexible liquid‐based DC generator (FLG) with exceptional stability and performance. In this design, an indium gallium zinc oxide (IGZO) film with excellent film uniformity, mechanical flexibility, and mature process [ 20 ] is adopted as the semiconductor layer in the metal‐liquid‐semiconductor sandwich structure, and polydimethylsiloxane (PDMS) is used to seal and package the generator. A high short‐circuit current ( I sc ) of 9.2 µA, corresponding to a current density of J sc ≈2.3 µA cm −2 , and an open‐circuit voltage of 620 mV, have been achieved by simply shaking or tilting the FLG slightly.…”
Section: Introductionmentioning
confidence: 99%
“…6,7 Amorphous indium gallium zinc oxide (a-IGZO) is one of the most widely researched oxide semiconductors owing to its high intrinsic electron concentration, electrical stability, high mobility, and wide bandgap. [8][9][10][11] A-IGZO thin films can be formed using a range of methods, such as solution processing, 12 atomic layer deposition, 13 and radio frequency (RF) sputtering. 14,15 On the other hand, electronic devices fabricated with as-deposited a-IGZO films often do not offer ideal performance because of issues with the film surface quality or the non-ideal atomic composition.…”
Section: Introductionmentioning
confidence: 99%
“…Unfortunately, commonly used transparent polymeric materials, including poly(ethylene terephthalate) (PET), poly(ethylene naphthalate) (PEN) and polycarbonate (PC), are found to be inappropriate to use as substrate materials for flexible organic light-emitting diode (OLED) displays mainly because it cannot withstand the fabrication conditions currently employed for thin film transistor (TFT) manufacturing [ 3 , 4 ]. For instance, the direct fabrication of transparent and flexible oxide thin-film transistors onto a polymer substrate often requires post thermal annealing and the polymer films should maintain its integrity during the heating process above 300 °C [ 5 , 6 , 7 ]. However, the glass transition and melting temperatures ( T g , and T m ) of the aforementioned polymer films are not high enough for TFT fabrication process [ 8 ].…”
Section: Introductionmentioning
confidence: 99%