Abstract:With the emergence of wired and wireless communication technologies, on-chip inductors find applications in a variety of high performance radio frequency (RF) circuits. In this work, we present two approaches for high-performance copper inductors in an RF technology. In the first approach (Type I), we lower ohmic losses to realize a high Q-factor. This is achieved by using, for the first time in a manufacturable technology, 4 µm thick copper spirals along with a 4 µm thick copper underpass on high-resistivity … Show more
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