2023
DOI: 10.1088/1674-1056/acd3e4
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High performance solar-blind deep ultraviolet photodetectors via β-phase (In0.09Ga0.91)2O3 single crystalline film

Bicheng 必成 Wang 王,
Ziying 梓荧 Tang 汤,
Huying 湖颖 Zheng 郑
et al.

Abstract: In this paper, we successfully fabricate a high performance β-phase (In0.09Ga0.91)2O3 single-crystalline film deep ultraviolet (DUV) solar-blind photodetector. The 2-inches high crystalline quality film is hetero-grown on sapphire substrates using plasma-assisted molecular beam epitaxy (PA-MBE). The smooth InGaO single crystalline film is used to construct the solar-blind DUV detector, which utilized an interdigitated Ti/Au electrode with a metal-semiconductor-metal structure. The device exhibited a low dark c… Show more

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“…[6][7][8] The development of polarizationsensitive devices is of crucial importance for meeting with the requirements of miniaturization, compactness, and high integration. [9,10] The versatility and engineerability of low-dimensional materials enable them to play superior roles in development of polarization-sensitive devices. [4,[11][12][13] For instance, by combining different types of low-dimensional materials, the spectral response range of opto-devices can be significantly broadened.…”
Section: Introductionmentioning
confidence: 99%
“…[6][7][8] The development of polarizationsensitive devices is of crucial importance for meeting with the requirements of miniaturization, compactness, and high integration. [9,10] The versatility and engineerability of low-dimensional materials enable them to play superior roles in development of polarization-sensitive devices. [4,[11][12][13] For instance, by combining different types of low-dimensional materials, the spectral response range of opto-devices can be significantly broadened.…”
Section: Introductionmentioning
confidence: 99%